Search Results - "Tjerkstra, R.W."

Micromachining of buried micro channels in silicon by de Boer, M.J., Tjerkstra, R.W., Berenschot, J.W., Jansen, H.V., Burger, G.J., Gardeniers, J.G.E., Elwenspoek, M., van den Berg, A.

“…A new method for the fabrication of micro structures for fluidic applications, such as channels, cavities, and connector holes in the bulk of silicon wafers,…”
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Self-Assembled Monolayer Coatings on Nanostencils for the Reduction of Materials Adhesion by Kölbel, M., Tjerkstra, R.W., Kim, G., Brugger, J., van Rijn, C.J.M., Nijdam, W., Huskens, J., Reinhoudt, D.N.

“…Nanostencils (shadow masks with submicrometer apertures in a thin silicon nitride membrane) are promising tools for the facile one‐step generation of…”
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Etching technology for chromatography microchannels by Tjerkstra, R.W., de Boer, M., Berenschot, E., Gardeniers, J.G.E., van den Berg, A., Elwenspoek, M.C.

“…Half-circular channels, to be used for gas chromatography, were etched isotropically using a mixture of HF, HNO 3 and H 2O. Two wafers with half-circular…”
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Porous silicon as a stationary phase for shear-driven chromatography by Clicq, D, Tjerkstra, R.W, Gardeniers, J.G.E, van den Berg, A, Baron, G.V, Desmet, G

“…We report on the possibility to strongly increase the mass loadability and retention capacity of shear-driven chromatography (SDC) channels by growing a thin…”
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Multi-walled microchannels: free-standing porous silicon membranes for use in /spl mu/TAS by Tjerkstra, R.W., Gardeniers, G.E., Kelly, J.J., van den Berg, A.

“…Electrochemically formed porous silicon (PS) can be released from the bulk silicon substrate by underetching at increased current density. Using this…”
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Multi-walled microchannels: free-standing porous silicon membranes for use in [mu]TAS by Tjerkstra, R.W, Gardeniers, G.E, Kelly, J.J, van den Berg, A

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Fabrication of functional structures on thin silicon nitride membranes by Ekkels, P., Tjerkstra, R.W., Krijnen, G.J.M, Berenschot, J.W., Brugger, J., Elwenspoek, M.C.

“…A process to fabricate functional polysilicon structures above large (4×4 mm 2) thin (200 nm), very flat LPCVD silicon rich nitride membranes was developed…”
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On the increase of the photocurrent quantum efficiency of GaP photoanodes due to (photo)anodic pretreatments by Vanmaekelbergh, D., Erné, B.H., Cheung, C.W., Tjerkstra, R.W.

“…It has been found that the photocurrent quantum efficiency of n-type GaP single crystal electrodes illuminated with visible light (green-blue) increases…”
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Fabrication of an active nanostencil with integrated microshutters by Tjerkstra, R.W., Ekkels, P., Krijnen, G., Egger, S., Berenschot, E., Ma, K.C., Brugger, J.

“…An active nanostencil, consisting of a thin (200 nm) silicon nitride membrane with attached polysilicon microactuators that can be used to dynamically open…”
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Etching technology for microchannels by Tjerkstra, R.W., De Boer, M., Berenschot, E., Gardeniers, J.G.E., van den Berg, A., Elwenspoek, M.

“…Various ways of fabricating channels in silicon are discussed. Some new channels are presented: the GPSICs and the LPCVD covered channels. Also some attention…”
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