Gas damping model for a RF MEM switch and its dynamic characteristics

Gas damping model for a RF MEM switch and its dynamic characteristics

A compact model for a capacitive RF MEM switch with damping is presented. The damping model is based on analytic expressions for flow resistances due to the rarefied air flow in the gap and in the perforation holes. The complete switch model is constructed of elements resulting from the discretizati...

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Bibliographic Details
Published in:2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278) Vol. 2; pp. 1213 - 1216 vol.2
Main Authors: Veijola, T., Tinttunen, T., Nieminen, H., Ermolov, V., Ryhanen, T.
Format: Conference Proceeding Journal Article
Language:English
Published: IEEE 2002
Subjects:
Bridge circuits
Capacitance
Communication switching
Damping
Electrostatics
Equivalent circuits
Radio frequency
Springs
Switches
Voltage
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Summary:A compact model for a capacitive RF MEM switch with damping is presented. The damping model is based on analytic expressions for flow resistances due to the rarefied air flow in the gap and in the perforation holes. The complete switch model is constructed of elements resulting from the discretization of the beam deflection equation and has been implemented as a nonlinear electrical equivalent circuit. The model reproduces the beam displacement accurately. Comparison with measured transient on/off capacitance characteristics shows very good agreement.
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ISBN:9780780372399
0780372395
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2002.1011874