Search Results - "Tilmans, H A C"

MEMS packaging and reliability: An undividable couple by Tilmans, H.A.C., De Coster, J., Helin, P., Cherman, V., Jourdain, A., De Moor, P., Vandevelde, B., Pham, N.P., Zekry, J., Witvrouw, A., De Wolf, I.

“…This paper reviews various approaches to package MEMS, illustrated mainly with examples from imec. Wafer-level or 0-level packaging is mostly dealt with. The…”
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Acoustic meta-materials in MEMS BAW resonators by Rottenberg, X., Jansen, R., Van Hoof, C., Tilmans, H. A. C.

“…This paper presents a meta-material-based design method for bulk acoustic wave (BAW) resonators with enhanced characteristics compared to those obtained with…”
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V-band low phase-noise oscillator based on a cavity resonator integrated in the silicon substrate of the MCM-D platform by Dancila, D., Rottenberg, X., John, A., Tilmans, H. A. C., De Raedt, W., Huynen, I.

“…In this article, we present a V‐band low‐phase‐noise oscillator stabilized by a silicon integrated cavity resonator (SiCR). The SiCR is realized in a multi…”
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Compact cavity resonators using high impedance surfaces by Dancila, D., Rottenberg, X., Focant, N., Tilmans, H. A. C., De Raedt, W., Huynen, I.

“…This paper presents a miniaturization concept for cavity resonators. The idea is to create a λ /4 long cavity resonator by using a combination of Perfect…”
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Materials issues in the processing, the operation and the reliability of MEMS by Witvrouw, A., Tilmans, H.A.C., De Wolf, I.

“…In this article materials issues that arise during the processing and operation of micro-electro mechanical systems devices (MEMS), and their impact on the…”
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Investigation of internal nonhomogenous volumes of perturbation as tuning and miniaturization elements for cavity resonators by Dancila, D., Rottenberg, X., Tilmans, H. A. C., De Raedt, W., Huynen, I.

“…In this article, we investigate the tuning and miniaturization performance induced by a volume perturbation inserted in a cavity resonator. The volume…”
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The indent reflow sealing (IRS) technique-a method for the fabrication of sealed cavities for MEMS devices by Tilmans, H.A.C., van de Peer, D.J., Beyne, E.

“…A variety of microelectromechanical system devices requires encapsulation of their crucial fragile parts in a hermetically sealed cavity for reasons of…”
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Nonlinearity and hysteresis of resonant strain gauges by Chengqun Gui, Legtenberg, R., Tilmans, H.A.C., Fluitman, J.H.J., Elwenspoek, M.

“…The nonlinearity and hysteresis effects of the electrostatically activated voltage-driven resonant microbridges have been studied theoretically and…”
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A wet release process for fabricating slender and compliant suspended micro-mechanical structures by Pamidighantam, S, Laureyn, W, Rusu, C, Baert, K, Puers, R, Tilmans, H.A.C

“…This paper reports on the development of a generic wet release process for the fabrication of suspended slender and compliant micro-mechanical structures of…”
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Fast analytical design of MEMS capacitive pressure sensors with sealed cavities by Rochus, V., Wang, B., Tilmans, H.A.C., Ray Chaudhuri, A., Helin, P., Severi, S., Rottenberg, X.

“…This paper presents a fast design strategy for MEMS capacitive pressure sensors with sealed cavities. Based on circular Kirchhoff-Love plate theory and the…”
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Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: Application to accelerometers by Guo, B, Wen, L, Helin, P, Claes, G, Verbist, A, Van Hoof, R, Du Bois, B, De Coster, J, De Wolf, I, Hadi Shahar, A, Li, Y, Cui, H, Lux, M, Vereecke, G, Tilmans, H A C, Haspeslagh, L, Decoutere, S, Osman, H, Puers, R, Severi, S, Witvrouw, A

“…We present an attractive poly-SiGe thin film packaging and MEM (Micro Electro-Mechanical) platform technology for integrating various packaged MEM devices…”
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Light sensitive SiGe MEM resonator for detection and frequency tuning applications by Stoffels, S, Severi, S, Vanhoof, R, Mertens, R, Puers, R, Witvrouw, A, Tilmans, H A C

“…This paper presents a silicon-based MEM resonant light sensor, a novel application for MEM resonators. The sensor is a particular kind of micro-bolometer in…”
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High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin film by Naito, Y, Helin, P, Nakamura, K, De Coster, J, Guo, B, Haspeslagh, L, Onishi, K, Tilmans, H A C

“…This paper reports on an SOI-based 20 MHz MEMS torsional resonator, wafer-level packaged using SiGe thin film and hermetically sealed using Al sputtering at…”
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A new characterization method for electrostatically actuated resonant MEMS: Determination of the mechanical resonance frequency, quality factor and dielectric charging by Kalicinski, S., Tilmans, H.A.C., Wevers, M., De Wolf, I.

“…In this paper, a novel technique to characterize MEMS is described. The technique is based on electric admittance measurements of electrostatically actuated…”
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Optimal T-support anchoring for bar-type BAW resonators by Jansen, R, Stoffels, S, Rottenberg, X, Zhang, Y, de Coster, J, Donnay, S, Severi, S, Borremans, J, Lofrano, M, van der Plas, G, Verheyen, P, de Raedt, W, Tilmans, H A C

“…This paper reports on an optimal support anchoring for bar-type BAW resonators. We demonstrate both theoretically and experimentally the implementation of long…”
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Design considerations and technology assessment of phased-array antenna systems with RF MEMS for automotive radar applications by Schoebel, J., Buck, T., Reimann, M., Ulm, M., Schneider, M., Jourdain, A., Carchon, G.J., Tilmans, H.A.C.

“…Planar array antennas are attractive for use in future automotive radar systems due to their flexibility in design and control of radar beams. The complexity…”
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Acoustic meta-materials in MEMS BAW resonators: Advances in Metamaterials and Photonics by ROTTENBERG, X, JANSEN, R, VAN HOOF, C, TILMANS, H. A. C

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Effect of substrate charging on the reliability of capacitive RF MEMS switches by Czarnecki, P., Rottenberg, X., Soussan, P., Ekkels, P., Muller, P., Nolmans, P., De Raedt, W., Tilmans, H.A.C., Puers, R., Marchand, L., De Wolf, I.

“…In this paper, we show that substrate charging is another possible failure mechanism limiting the lifetime of capacitive RF MEMS switches. Switches fabricated…”
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A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators by Dancila, D, Ekkels, P, Rottenberg, X, Huynen, I, De Raedt, W, Tilmans, H A C

“…This paper reports the design and the realization of a variable-sized MEMS-based Faraday cage, used to tune the resonant frequency of a silicon micromachined…”
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Challenges of monolithic integration for SiGe MEMS technology by Chaudhuri, A. Ray, Severi, S., Helin, P., Francis, L. A., Tilmans, H. A. C.

“…The paper describes the key challenges of CMOS integrated monolithic MEMS Accelerometer with SiGe MEMS technology combined with TSMC 0.18 μm CMOS technology…”
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