Search Results - "Thevenod, Laurent"

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    On the mobility in high- κ/metal gate MOSFETs: Evaluation of the high- κ phonon scattering impact by Weber, Olivier, Cassé, Mikael, Thevenod, Laurent, Ducroquet, Frédérique, Ernst, Thomas, Deleonibus, Simon

    Published in Solid-state electronics (01-04-2006)
    “…We report an experimental study of the mobility in TiN/HfO 2 gate stacks focused on the accurate determination of the HfO 2 remote soft phonon scattering…”
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