Pulsed Low Frequency Inductively Coupled Plasma Generator and Applications

In this paper, an inductively coupled pulsed plasma source with an operating frequency of 29 kHz is described. Using a series resonance circuit with a load capacitance of 12 muF and large diameter (approximately 20 cm) induction coils surrounding a spherical discharge vessel, a discharge plasma was...

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Bibliographic Details
Published in:	IEEE transactions on plasma science Vol. 36; no. 4; pp. 1930 - 1936
Main Authors:	Teske, C.J., Jacoby, J.
Format:	Journal Article
Language:	English
Published:	New York, NY IEEE 01-08-2008 Institute of Electrical and Electronics Engineers The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Capacitance Circuits Coils Coupling circuits Diagnostic systems Diagnostics Discharge Discharges for spectral sources (including inductively coupled plasmas) Driving Electric circuits Electric currents Electric discharges Exact sciences and technology Fault location Frequencies Frequency Induction coils Induction generators Joining Low frequencies Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma Plasma applications Plasma density plasma dynamics Plasma production and heating Plasma sources Pulse generation RLC circuits Spectrum analysis Diagnostics Low frequency Inductors Plasma sources Plasma dynamics Coupled plasma Pressure dependence Inductively coupled plasma Pulsed discharge Energetic efficiency Emission spectra Plasma generation Capacitive coupling Inductive coupling Electron density Pulsed power technology
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Summary:	In this paper, an inductively coupled pulsed plasma source with an operating frequency of 29 kHz is described. Using a series resonance circuit with a load capacitance of 12 muF and large diameter (approximately 20 cm) induction coils surrounding a spherical discharge vessel, a discharge plasma was produced and investigated in a pressure range of 0.1 to 100 Pa. Pulsed coil currents reached a maximum value of 9.6 kA with current rise times of 1.8 kA/mus while achieving an energy coupling efficiency of 80% between the driving circuit and the plasma. Pulsed-power peak values reached more than 800 kW. Moreover, the spectroscopic diagnostic revealed a high fraction of ionized particles and an emission spectrum in the near UV domain. Electron densities reached peak values of 10 21 m -3 . By using a fast camera system, the initiation of the discharge was investigated. The ignition of the discharge along an azimuthal path was documented, showing evidence of an entirely inductive plasma initiation without capacitive coupling.
Bibliography:	ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23
ISSN:	0093-3813 1939-9375
DOI:	10.1109/TPS.2008.927377