Search Results - "Teramoto, Akinobu"
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Interface analysis of oxide free MoS2 films fabricated by solution process
Published in Scientific reports (05-11-2024)“…We report a solution-based approach for the synthesis of oxidation-free MoS 2 films, focusing on interface analysis. Through a sulfurization-free solution…”
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Control of ion-flux and ion-energy in direct inductively coupled plasma reactor for interfacial-mixing plasma-enhanced atomic layer deposition
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-05-2020)“…The effects of low-energy (<15 eV) high-flux O2+ ion bombardment on the properties of Al2O3 films deposited on 3D nanostructures by plasma-enhanced atomic…”
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Stable yttrium oxyfluoride used in plasma process chamber
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-03-2017)“…An yttrium oxyfluoride (YOF) protective material was developed for the inner wall of plasma process equipment. Using microwave-excited surface-wave…”
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Hole-Trapping Process at Al2O3/GaN Interface Formed by Atomic Layer Deposition
Published in IEEE electron device letters (01-09-2017)“…The hysteresis of the capacitance-voltage (C-V) characteristics of an Al 2 O 3 /n-GaN metal-insulator-semiconductor structure was evaluated under light (white…”
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Performances of accumulation-mode n- and p-MOSFETs on Si(110) wafers
Published in Japanese Journal of Applied Physics (01-04-2017)“…In this study, we investigate the electrical and noise performances of accumulation-mode n- and p-MOSFETs on Si(110) wafers and compare them with conventional…”
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Experimental investigation of localized stress-induced leakage current distribution in gate dielectrics using array test circuit
Published in Japanese Journal of Applied Physics (01-04-2018)“…Localized stress-induced leakage current (SILC) has become a major problem in the reliability of flash memories. To reduce it, clarifying the SILC mechanism is…”
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Impact of CoFeB surface roughness on reliability of MgO films in CoFeB/MgO/CoFeB magnetic tunnel junction
Published in Japanese Journal of Applied Physics (01-08-2019)“…We investigated the impact of the interface roughness in W-CoFeB-MgO-CoFeB-W structures on MgO reliability using the atomic force microscopy images of a MgO…”
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A Statistical Evaluation of Random Telegraph Noise of In-Pixel Source Follower Equivalent Surface and Buried Channel Transistors
Published in IEEE transactions on electron devices (01-10-2013)“…Using a large-scale array test circuit, both static characteristics and random telegraph noise (RTN) of in-pixel source follower equivalent transistors of a…”
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Impact of doping concentration on 1/f noise performances of accumulation-mode Si(100) n-MOSFETs
Published in Japanese Journal of Applied Physics (01-04-2016)“…The superiority of highly doped accumulation-mode n-MOSFETs over the conventional inversion-mode ones has been acknowledged in this paper, not only in terms of…”
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High Quality SiO2/Al2O3 Gate Stack for GaN Metal--Oxide--Semiconductor Field-Effect Transistor
Published in Jpn J Appl Phys (25-04-2013)“…High quality SiO 2 /Al 2 O 3 gate stack has been demonstrated for GaN metal--oxide--semiconductor (MOS) transistor. We confirmed that Al 2 O 3 could realize a…”
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11
Effect of drain current on appearance probability and amplitude of random telegraph noise in low-noise CMOS image sensors
Published in Japanese Journal of Applied Physics (01-04-2018)“…Random telegraph noise (RTN), which occurs in in-pixel source follower (SF) transistors, has become one of the most critical problems in high-sensitivity CMOS…”
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Atomically Flat Silicon Surface and Silicon/Insulator Interface Formation Technologies for (100) Surface Orientation Large-Diameter Wafers Introducing High Performance and Low-Noise Metal-Insulator-Silicon FETs
Published in IEEE transactions on electron devices (01-02-2009)“…Technology to atomically flatten the silicon surface on (100) orientation large-diameter wafer and the formation technology of an atomically flat insulator…”
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Low-Interface-Trap-Density and High-Breakdown-Electric-Field SiN Films on GaN Formed by Plasma Pretreatment Using Microwave-Excited Plasma-Enhanced Chemical Vapor Deposition
Published in IEEE transactions on electron devices (01-06-2013)“…We investigated the SiN/GaN interface properties formed by the microwave-excited plasma-enhanced chemical vapor deposition (PECVD) with SiH 4 /N 2 /H 2 gases…”
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Extraction of time constants ratio over nine orders of magnitude for understanding random telegraph noise in metal-oxide-semiconductor field-effect transistors
Published in Japanese Journal of Applied Physics (01-04-2014)“…The random telegraph noise (RTN) characteristics in numerous metal-oxide-semiconductor field-effect transistors were evaluated accurately with small floor…”
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Proposal of tunneling- and diffusion-current hybrid MOSFET: A device simulation study
Published in Japanese Journal of Applied Physics (01-04-2016)“…Transistors with low-power operation and sufficient signal processing speed have been widely required especially for mobile applications. To meet these…”
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Carrier mobility characteristics of (100), (110), and (551) oriented atomically flattened Si surfaces for fin structure design of multi-gate metal-insulator-silicon field-effect transistors
Published in Japanese Journal of Applied Physics (01-04-2014)“…This paper reports on the carrier mobility characteristics of (100), (110), and (551) oriented atomically flattened Si surfaces for the fin structure design of…”
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Formation speed of atomically flat surface on Si (1 0 0) in ultra-pure argon
Published in Microelectronic engineering (01-10-2011)“…The flattening speed of the low temperature atomically flattening technology is evaluated in order to apply atomically flat surface of (1 0 0) orientation on…”
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Very High Carrier Mobility for High-Performance CMOS on a Si(110) Surface
Published in IEEE transactions on electron devices (01-06-2007)“…In this paper, we demonstrate CMOS characteristics on a Si(110) surface using surface flattening processes and radical oxidation. A Si(110) surface is easily…”
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Hole Mobility in Accumulation Mode Metal--Oxide--Semiconductor Field-Effect Transistors
Published in Japanese Journal of Applied Physics (01-04-2012)“…The paper deals with the investigation of the mobility in accumulation mode p-channel metal--oxide--semiconductor field-effect transistors (p-MOSFETs). The…”
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Characterization of MgZnO films grown by plasma enhanced metal-organic chemical vapor deposition
Published in Thin solid films (31-03-2010)“…MgZnO (magnesium–zinc-oxide) films were grown on (11–20) sapphire substrates and Zn-polar ZnO substrates by plasma enhanced metal-organic chemical vapor…”
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