Search Results - "Tejnil, Edita"

Characterization of extreme ultraviolet imaging systems by Tejnil, Edita

“…The optical performance of extreme ultraviolet (EUV) imaging systems is investigated. Wavefront-measuring point diffraction interferometry is implemented at…”
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Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions by Attwood, D.T., Naulleau, P., Goldberg, K.A., Tejnil, E., Chang Chang, Beguiristain, R., Batson, P., Bokor, J., Gullikson, E.M., Koike, M., Medecki, H., Underwood, J.H.

“…Undulator radiation, generated by relativistic electrons traversing a periodic magnet structure, can provide a continuously tunable source of very bright and…”
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Characterization of extreme ultraviolet imaging systems by Tejnil, Edita

“…The optical performance of extreme ultraviolet (EUV) imaging systems is investigated. Wavefront-measuring point diffraction interferometry is implemented at…”
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Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks by Jeong, Seongtae, Johnson, Lewis, Rekawa, Seno, Walton, Chris C., Prisbrey, Shon T., Tejnil, Edita, Underwood, James H., Bokor, Jeffrey

“…We present recent experimental results from a prototype actinic (operates at the 13 nm extreme ultraviolet wavelength) defect inspection system for extreme…”
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At-wavelength interferometry for extreme ultraviolet lithography by Tejnil, Edita, Goldberg, Kenneth A., Lee, SangHun, Medecki, Hector, Batson, Phillip J., Denham, Paul E., MacDowell, Alastair A., Bokor, Jeffrey, Attwood, David

“…A phase-shifting point diffraction interferometer is being developed for at-wavelength testing of extreme ultraviolet lithographic optical systems. The…”
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