Search Results - "Tarkhov, M.A."

A comprehensive study of simultaneous RF-PECVD synthesis of n-diamond and carbon nanowalls hybrid structure over a large area by Mumlyakov, A.M., Pershina, E.A., Bondareva, Ju.V., Nekludova, P.A., Shibalova, A.A., Shibalov, M.V., Anufriev, Yu.V., Tagachenkov, A.M., Tarkhov, M.A.

“…In this study, n-diamond–carbon nanowalls hybrid structure was synthesized on a 4-inch diameter silicon wafer by RF-PECVD technique (type CCP). A comprehensive…”
Get full text

Mechanism of graphene oxide laser reduction at ambient conditions: Experimental and ReaxFF study by Orekhov, N.D., Bondareva, J.V., Potapov, D.O., Dyakonov, P.V., Dubinin, O.N., Tarkhov, M.A., Diudbin, G.D., Maslakov, K.I., Logunov, M.A., Kvashnin, D.G., Evlashin, S.A.

“…Search for a cheap and efficient route of graphene fabrication is still far from its conclusion, and reduction of graphene oxide (GO) is considered one of the…”
Get full text

Ultrathin epitaxial NbNx film deposited by PEALD method on C-plane sapphire: Growth, structure and superconducting properties by Shibalov, M.V., Sirotina, A.P., Pershina, E.A., Martovitskii, V.P., Shibalova, A.A., Mumlyakov, A.M., Trofimov, I.V., Timofeeva, E.R., Porokhov, N.V., Zenova, E.V., Tarkhov, M.A.

“…Here we report on the results of obtaining and study of epitaxial ultrathin superconductive films of niobium nitride (NbNx) grown on a C-plane sapphire…”
Get full text

Fabrication and characterization of quasi-three-dimensional capacitor structure based on carbon nanowalls by Mumlyakov, A.M., Shibalov, M.V., Timofeeva, E.R., Trofimov, I.V., Porokhov, N.V., Evlashin, S.A., Nekludova, P.A., Pershina, E.A., Anufriev, Yu.V., Tagachenkov, A.M., Zenova, E.V., Tarkhov, M.A.

“…Vertically oriented graphene structures have a high specific surface area which makes them potential candidates for realization of various devices. On their…”
Get full text

Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure by Mumlyakov, A.M., Shibalov, M.V., Trofimov, I.V., Verkholetov, M.G., Orlov, A.P., Diudbin, G.D., Evlashin, S.A., Nekludova, P.A., Anufriev, Yu.V., Tagachenkov, A.M., Zenova, E.V., Tarkhov, M.A.

“…This study presents dielectric properties investigation of hafnium oxide (HfOx), aluminum oxide (AlOx) and tantalum oxide (TaOx) thin films and HfAlTaOx…”
Get full text

Void-free uniform gap filling between thick PECVD silicon nitride waveguides by Mumlyakov, A.M., Dmitriev, N.Yu, Shibalov, M.V., Trofimov, I.V., Filippov, I.A., Anikanov, A.A., Bilenko, I.A., Tarkhov, M.A.

“…In this paper, we demonstrate novel fabrication technology for silicon nitride photonics aimed at solving the problem of defects (void) in the region of…”
Get full text

PECVD-fabricated microresonators for nonlinear photonics by Dmitriev, N. Yu, Mumlyakov, A.M., Shibalov, M.V., Trofimov, I.V., Filippov, I.A., Anikanov, A.A., Tarkhov, M.A., Bilenko, I.A.

“…We demonstrate characteristics of high-Q ring silicon nitride microresonators fabricated with novel PECVD process. Proposed process allows to fabricate silicon…”
Get full text

Terahertz response of thin-film YBCO bolometers by Smirnov, A. V., Karmantsov, M. S., Smirnov, K. V., Vakhtomin, Yu. B., Masterov, D. V., Tarkhov, M. A., Pavlov, S. A., Parafin, A. E.

“…The bolometric response of high-temperature thin-film YBCO superconducting detectors to an electromagnetic radiation with a frequency of 2.5 THz is measured…”
Get full text