Thermal Stability of the Structure and Optical Properties of Nanostructured TIO2 Films

Thermal Stability of the Structure and Optical Properties of Nanostructured TIO2 Films

The structure and optical properties of titanium dioxide films have been studied during annealing from 100 to 400°C. The films were obtained by ion-plasma high-frequency magnetron sputtering of polycrystalline rutile target in an argon atmosphere. It was shown that as-prepared TiO 2 films are nanost...

Full description

Saved in:
Bibliographic Details
Published in:Russian physics journal Vol. 63; no. 12; pp. 2045 - 2051
Main Authors: Mikhailova, S. L., Prikhodko, O. Yu, Mukhametkarimov, Ye. S., Dautkhan, K., Doseke, U. A., Kozyukhin, S. A., Kozik, V. V., Ismailova, G. A., Maksimova, S. Ya, Tarapeyeva, A. Yu, Zhakypov, A. S.
Format: Journal Article
Language:English
Published: New York Springer US 01-04-2021
Springer Nature B.V
Subjects:
Anatase
Annealing
Argon
Condensed Matter Physics
Crystallites
Energy gap
Hadrons
Heavy Ions
Lasers
Magnetron sputtering
Mathematical and Computational Physics
Nanostructure
Nuclear Physics
Optical Devices
Optical properties
Optics
Optics and Spectroscopy
Photonics
Physics
Physics and Astronomy
Refractivity
Rutile
Structural stability
Theoretical
Thermal stability
Titanium dioxide
ion-plasma sputtering
refractive index
titanium dioxide films
annealing
structure
optical band gap
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The structure and optical properties of titanium dioxide films have been studied during annealing from 100 to 400°C. The films were obtained by ion-plasma high-frequency magnetron sputtering of polycrystalline rutile target in an argon atmosphere. It was shown that as-prepared TiO 2 films are nanostructured with ~8 nm rutile crystallites and ~3.3 Å interplanar distances and contain a small fraction of anatase. The optical band gap of the films is 3.01 eV, and the refractive index under normal conditions is 2.25. The film annealing at tamperatures from 100 to 400°C does not practically change their structure, optical band gap, and refractive index under normal conditions, i.e., the obtained nanostructured TiO 2 films are thermally stable.
ISSN:1064-8887
1573-9228
DOI:10.1007/s11182-021-02272-y