Search Results - "Tan Chan Lik"
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Improved Deep Body Implant on Breakdown Voltage in Super Junction of Vertical VDMOS
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01-05-2014)“…In this paper, we demonstrate a new technique to improve the breakdown voltage of a vertical n-channel power transistor (VDMOS) by increasing the energy of its…”
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Conference Proceeding -
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The effect of H3PO4 processing on LDMOS gate oxide integrity in PolySilicon buffered LOCOS
Published in 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01-05-2017)“…The objective of this work is to investigate gate oxide degradation in Lateral Double Diffused metal-oxide semiconductor (LDMOS) devices associated with…”
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Conference Proceeding -
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Current Gain Reduction in Bipolar Junction Transistors Induced by Carbon Contamination from H3PO4-Based Etchant
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01-05-2023)“…A new mechanism contributed to current gain reduction in Bipolar Junction Transistors that was caused by contamination of H 3 PO 4 during silicon nitride…”
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Conference Proceeding -
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A study of fluorine dose and implant energy to the NBTI upon p+ implant sequence
Published in 2013 IEEE International Conference of Electron Devices and Solid-state Circuits (01-06-2013)“…Negative Bias Temperature Instability (NBTI) is one of the major issues related to p-channel metal-oxide-semiconductor (PMOS) reliability that has been…”
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Conference Proceeding -
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A new method on Cu stress measurement by bandgap voltage reference circuit
Published in 2013 IEEE International Conference of Electron Devices and Solid-state Circuits (01-06-2013)“…Cu metallization is not only used in low power logic circuit but also in high power automotive application because of its low resistance and robustness in…”
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Conference Proceeding -
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An improved P+/N diode leakage current in BiCMOS technologies with fluorine co-implant
Published in 2012 10th IEEE International Conference on Semiconductor Electronics (ICSE) (01-09-2012)“…Fluorine (F) is a co-implant species known to have numbers of beneficial effects to the semiconductor device. In this study, we demonstrate the effect of…”
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Conference Proceeding -
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A study of deep body implant into the base of Vertical NPN bipolar transistors
Published in 2010 34th IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT) (01-11-2010)“…In this paper, we demonstrate the sensitivity of base resistance by different tilt angle of deep body implant into the base of Vertical NPN bipolar…”
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Conference Proceeding -
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Characterization of SOI Film Thickness, Oxide Thickness and Charges with C-V Measurement
Published in 2018 IEEE International Conference on Semiconductor Electronics (ICSE) (01-08-2018)“…Capacitance-Voltage measurement is a crucial method to characterize and study the behavior of the device. In this work, the capacitance voltage characteristics…”
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Conference Proceeding -
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A study of fluorine implant in the formation of low leakage P+/N junction in BiCMOS technologies
Published in 2012 International Conference on Enabling Science and Nanotechnology (01-01-2012)“…As device and technologies gets shrink, ion implantation becomes very critical and important process. Fluorine is one of the dopant that is widely been studied…”
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Conference Proceeding