Search Results - "Takeuchi, Yukihiro"

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering by Akiyama, Morito, Kamohara, Toshihiro, Kano, Kazuhiko, Teshigahara, Akihiko, Takeuchi, Yukihiro, Kawahara, Nobuaki

“…A high‐temperature piezoelectric material exhibits a good balance between high maximum use temperature and large piezoelectricity. This is achieved by the…”
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Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration by Tanemura, Tomoki, Yamashita, Shuichi, Wado, Hiroyuki, Takeuchi, Yukihiro, Tsuchiya, Toshiyuki, Tabata, Osamu

“…This paper describes a new fatigue testing method for polycrystalline-silicon (polysilicon) thin-film membrane to evaluate its mechanical reliability not…”
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Fatigue Testing of Polycrystalline Silicon Thin-Film Membrane Using Out-of-Plane Bending Vibration by Tanemura, Tomoki, Yamashita, Shuichi, Wado, Hiroyuki, Takeuchi, Yukihiro, Tsuchiya, Toshiyuki, Tabata, Osamu

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Development of RIE-lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method by Ohara, Junji, Asami, Kazushi, Takeuchi, Yukihiro, Sato, Kazuo

“…In this study, we have developed a new reactive ion etching (RIE)‐lag reduction technique in Si deep etching. The conventional RIE‐lag reduction technique has…”
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Development of Si DRIE process allowing simultaneous etching from narrow and wide mask openings by Ohara, Junji, Takeuchi, Yukihiro, Sato, Kazuo

“…We have developed a new Si DRIE process, which allows simultaneous etching of both narrow and wide mask opening patterns. MEMS devices often contain a wide…”
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Critical-layer thickness of a pseudomorphic In0.8Ga0.2As heterostructure grown on InP by TACANO, M, SUGIYAMA, Y, TAKEUCHI, Y

“…A very high electron mobility pseudomorphic In0.8Ga0.2As heterostructure is successfully grown on InP both by the elimination of the overshoot of flux…”
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Infrared absorption sensor for multiple gas sensing. Development of a Fabry-Perot spectrometer with ultrawide wavelength range by Enomoto, Tetsuya, Suzuki, Megumi, Iwaki, Takao, Wado, Hiroyuki, Takeuchi, Yukihiro

“…We report on a novel MEMS (microelectromechanical system) based on a Fabry–Perot spectrometer with an ultrawide wavelength range (3.2 to 8.4 µm) compared to…”
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Development of fabrication process for integrated micro-optical elements on Si substrate by Ohara, Junji, Kano, Kazuhiko, Takeuchi, Yukihiro

“…We have developed a new process for fabricating micro-optical elements by applying deep reactive ion etching (DRIE) process and thermal oxidation. This…”
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Temperature dependence of piezoelectric properties of sputtered AlN on silicon substrate by Kano, Kazuhiko, Arakawa, Kazuki, Takeuchi, Yukihiro, Akiyama, Morito, Ueno, Naohiro, Kawahara, Nobuaki

“…We report for the first time the temperature dependence of the piezoelectric coefficient d 33 of the aluminum nitride (AlN) film measured at temperatures up to…”
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In-depth distribution of ion irradiation defects evaluated by mobility of Al0.3Ga0.7As/GaAs two-dimensional electron gas by TAKEUCHI, Y, SOGA, H, UENO, Y, KANAYAMA, T, SUGIYAMA, Y, TACANO, M

“…It has been found that the low-temperature (<100 K) mobility of two-dimensional electron gas is a sensitive and quantitative measure for ion irradiation…”
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Evaluation of a Post-analysis Method for Cumulative Dose Distribution in Stereotactic Body Radiotherapy by Imae, Toshikazu, Saotome, Naoya, Takenaka, Shigeharu, Watanabe, Yuuichi, Takeuchi, Yukihiro, Yano, Keiichi, Nakano, Masahiro, Haga, Akihiro, Takahashi, Wataru, Yamashita, Hideomi, Nakagawa, Keiichi, Ohtomo, Kuni

“…The purpose of this study was to evaluate a post-analysis method for cumulative dose distribution in stereotactic body radiotherapy (SBRT) using volumetric…”
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Evaluation of In Vivo Volumetric Dosimetry for Prostate Cancer Using Electronic Portal Imaging Device by Imae, Toshikazu, Takenaka, Shigeharu, Watanabe, Yuuichi, Okano, Yukari, Nedu, Makoto, Saegusa, Shigeki, Takeuchi, Yukihiro, Yano, Keiichi, Haga, Akihiro, Shiraishi, Kenshirou, Yamashita, Hideomi, Nakagawa, Keiichi

“…Volumetric modulated arc therapy (VMAT) is capable of acquiring projection images using electronic portal imaging device (EPID). Commercial EPID-based…”
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Dose reconstruction using respiratory signals and machine parameters during treatment in stereotactic body radiotherapy by Imae, Toshikazu, Haga, Akihiro, Saotome, Naoya, Kida, Satoshi, Nakano, Masahiro, Takenaka, Shigeharu, Takeuchi, Yukihiro, Shiraki, Takashi, Yano, Keiichi, Yamashita, Hideomi, Nakagawa, Keiichi, Ohtomo, Kuni

“…Volumetric modulated arc therapy (VMAT) is a rotational intensity-modulated radiotherapy (IMRT) technique capable of acquiring projection images during…”
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Development of RIE-lag Reduction Technique for Si Deep Etching Using Double Protection Layer Method : State-of-the-art MEMS Tecnologies by OHARA, Junji, ASAMI, Kazushi, TAKEUCHI, Yukihiro, SATO, Kazuo

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Critical layer thickness of n-In0.52Al0.48As/In0.8Ga0.2As/In0.52Al0.48As pseudomorphic heterostructures studied by photoluminescence by UENO, Y, TAGUCHI, T, MATSUGATANI, K, TAKEUCHI, Y, SUGIYAMA, Y, TACANO, M, HATTORI, T

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The law of the iterated logarithm for subsequences: A simple proof by Fukuyama, K., Takeuchi, Y.

“…We give a simple proof of the law of the iterated logarithm for subsequences of sums of i.i.d…”
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Critical-layer thickness of a pseudomorphic In(0.8)Ga(0.2)As heterostructure grown on InP by TACANO, MUNECAZU, Sugiyama, Yoshinobu, Takeuchi, Yukihiro

“…A very high electron mobility pseudomorphic In(0.8)Ga(0.2)As heterostructure is successfully grown on InP both by the elimination of the overshoot of flux…”
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A Process-Variation-Adaptive Network-on-Chip with Variable-Cycle Routers by Nakata, Y., Takeuchi, Y., Kawaguchi, H., Yoshimoto, M.

“…As process technology is scaled down, a typical system on a chip (SoC) becomes denser. In scaled process technology, process variation becomes greater and…”
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Scalable parallel processing for H.264 encoding application to multi/many-core processor by Takeuchi, Y, Nakata, Y, Kawaguchi, H, Yoshimoto, M

“…Although valuable, the high-quality video compression format H.264/AVC workload complicates real-time encoding. This paper describes scalable parallel…”
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In situ Hall measurement of two-dimensional electron gas at Al0.3Ga0.7As/GaAs interface irradiated with 10-keV Ar ions by KANAYAMA, T, TAKEUCHI, Y, SUGIYAMA, Y, TACANO, M

“…In situ Hall measurements reveal that the mobility of two-dimensional electron gas 80-nm-deep from the surface decreases simultaneously with 10-keV Ar-ion…”
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