Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators

Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators

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Bibliographic Details
Published in:Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 Vol. 2; pp. 356 - 359
Main Authors: Chu, P.B., Nelson, P.R., Tachiki, M.L., Pister, K.S.J.
Format: Conference Proceeding
Language:English
Published: IEEE 1995
Subjects:
Capacitors
Electromechanical systems
Electrostatic actuators
Electrostatic measurements
Fabrication
Grippers
Laser modes
Low voltage
Springs
Testing
Online Access:Get full text
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Description
ISBN:9789163034732
9163034735
DOI:10.1109/SENSOR.1995.721820