Search Results - "Suzuki, S.C."

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    PREVAIL e-beam stepper alpha tool by Pfeiffer, H.C., Dhaliwal, R.S., Golladay, S.D., Doran, S.K., Gordon, M.S., Kendall, R.A., Lieberman, J.E., Pinckney, D.J., Quickle, R.J., Robinson, C.F., Rockrohr, J.D., Stickel, W., Tressler, E.V., Tanimoto, A., Yamaguchi, T., Okamoto, K., Suzuki, K., Miura, T., Okino, T., Kawata, S., Morita, K., Suzuki, S.C., Shimizu, H., Kojima, S., Varnell, G., Novak, W.T., Sogard, M.

    Published in Microelectronic engineering (01-09-2001)
    “…PREVAIL is the high throughput e-beam projection approach to NGL, which IBM is pursuing in cooperation with Nikon as alliance partner. Key lithographic…”
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    Journal Article Conference Proceeding