Search Results - "Suvkhanov, A."
-
1
New VDMOS structure with Discontinuous Thick Inter-Body Oxide to reduce gate-to-drain charge
Published in 2010 22nd International Symposium on Power Semiconductor Devices & IC's (ISPSD) (01-06-2010)“…A new vertical power MOSFET (VDMOS) structure with a Discontinuous Thick Inter-Body Oxide (DTIBO) is presented and experimentally analyzed in this paper. The…”
Get full text
Conference Proceeding -
2
Fine structure of near-band-edge photoluminescence in He+-irradiated GaN grown on SiC
Published in Applied physics letters (01-06-1998)“…The effect of He ion implantation on the optical properties of epitaxial GaN-on-SiC was studied. We observed that He+ irradiation increases the relative…”
Get full text
Journal Article -
3
Influence of oxygen background pressure on crystalline quality of SrTiO3 films grown on MgO by pulsed laser deposition
Published in Applied physics letters (22-09-1997)“…We have systematically investigated the effect of oxygen partial pressure (PO2) on the crystalline quality of SrTiO3 films grown on MgO (001) substrates using…”
Get full text
Journal Article -
4
Ion implantation of epitaxial GaN films: damage, doping and activation
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-05-1997)“…Monocrystalline GaN films grown on AlN buffer layers previously deposited on 6HSiC(0001) wafers and having dislocation densities on the order of 10 7 cm/cm 3…”
Get full text
Journal Article -
5
Radiation Characteristics of a 0.11μm Modified Commercial CMOS Process
Published in 2006 IEEE Radiation Effects Data Workshop (01-07-2006)“…The authors present radiation data, total ionizing dose and single event effects, on the LSI logic 0.11 μm commercial process and two modified versions of this…”
Get full text
Conference Proceeding -
6
X-ray and secondary ion mass spectrometry investigation of activation behavior of self-preamorphized silicon substrate
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-01-2004)“…The junctions for p-type source/drain and extensions for sub-100 nm technology nodes can be formed by using low energy beamline implantation, plasma doping, or…”
Get full text
Conference Proceeding -
7
Investigation of indium activation by SRP and SIMS for sub-0.1 μm retrograde channels
Published in Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on (2002)“…SRP, SIMS and C-V measurements of implanted Si wafers were carried out in this study to examine the effect of annealing conditions on the activation of…”
Get full text
Conference Proceeding