Search Results - "Sundaram, Sam L."
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1
Sequential deposition of SiO2 and poly‐Si in isolation trenches
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-07-1993)“…Low pressure chemical vapor deposition (LPCVD) of SiO2 from tetraethoxysilane followed by LPCVD of polycrystalline silicon (poly‐Si) from silane is used to…”
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Conference Proceeding Journal Article -
2
Double implant low dose technique in analog IC fabrication
Published in IEEE transactions on semiconductor manufacturing (01-11-1989)“…The authors outline the utilization of low-dose implant monitoring (boron, 10/sup 11/ ions/cm/sup 2/) in a manufacturing line to control the pinchoff voltage…”
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Journal Article -
3
Reducing fabrication variability in analog IC technology by the statistical error propagation method using simple test structures
Published in International Conference on Microelectronic Test Structures (1990)“…The statistical error propagation method is used to analyze the parametric variance of current gain and breakdown voltage in bipolar analog integrated circuits…”
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Conference Proceeding