Search Results - "Suh, Dongchan"
-
1
Controlling the defects and transition layer in SiO2 films grown on 4H-SiC via direct plasma-assisted oxidation
Published in Scientific reports (10-10-2016)“…The structural stability and electrical performance of SiO 2 grown on SiC via direct plasma-assisted oxidation were investigated. To investigate the changes in…”
Get full text
Journal Article -
2
Surface chemical structure and doping characteristics of boron-doped Si nanowires fabricated by plasma doping
Published in Applied surface science (15-10-2017)“…•Dopant activations of plasma-doped (PD-) Si NWs are investigated with RTA time.•Chemical states and Fano factor of PD-Si NWs are changed with the dopant…”
Get full text
Journal Article -
3
Controlling the defects and transition layer in SiO 2 films grown on 4H-SiC via direct plasma-assisted oxidation
Published in Scientific reports (10-10-2016)“…The structural stability and electrical performance of SiO grown on SiC via direct plasma-assisted oxidation were investigated. To investigate the changes in…”
Get full text
Journal Article