Search Results - "Suda, Ryutaro"
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1
Liquid-phase deposition of thin Si and Ge films based on ballistic hot electron incidence
Published in Materials science in semiconductor processing (01-11-2017)“…Using the reducing activity of ballistic hot electrons emitted from a nanocrystalline silicon (nc-Si) diode, it is demonstrated that thin Si and Ge films can…”
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Journal Article -
2
Deposition of thin Si and Ge films by ballistic hot electron reduction in a solution-dripping mode and its application to the growth of thin SiGe films
Published in Japanese Journal of Applied Physics (01-04-2015)“…To enhance the usefulness of ballistic hot electron injection into solutions for depositing thin group-IV films, a dripping scheme is proposed. A very small…”
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3
Improved quasiballistic electron emission from a nanocrystalline Si cold cathode with a monolayer-graphene surface electrode
Published in Applied physics letters (26-03-2018)“…The quasiballistic electron emission from a nanocrystalline porous silicon (nc-Si) diode is drastically enhanced by using a monolayer-graphene film as the…”
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4
Pseudo-Wet Plasma Mechanism Enabling High-Throughput Dry Etching of SiO 2 by Cryogenic-Assisted Surface Reactions
Published in Small methods (02-06-2024)“…Manufacturing semiconductor devices requires advanced patterning technologies, including reactive ion etching (RIE) based on the synergistic interactions…”
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Journal Article -
5
Pseudo-Wet Plasma Mechanism Enabling High-Throughput Dry Etching of SiO2 by Cryogenic-Assisted Surface Reactions
Published in Small methods (02-06-2024)“…Manufacturing semiconductor devices requires advanced patterning technologies, including reactive ion etching (RIE) based on the synergistic interactions…”
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Journal Article -
6
A fully customized hardware system for ultra-fast feedback-controlled electromigration using FPGA
Published in 14th IEEE International Conference on Nanotechnology (01-08-2014)“…Electromigration (EM) method for the fabrication of nanogaps is specifically simple as compared with other methods because it is achieved by only passing a…”
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Conference Proceeding -
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Resistive switching effects in electromigrated Ni nanogaps
Published in 14th IEEE International Conference on Nanotechnology (01-08-2014)“…Recently, resistive switches have been constructed from nanogap electrodes. We have already reported a simple method for the fabrication of nanogaps with…”
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Conference Proceeding -
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Electrical properties of nanogap-based single-electron transistors fabricated by field-emission-induced electromigration
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01-08-2013)“…We report a simple and easy method for the control of electrical characteristics of planar-type nanogap-based single-electron transistors (SETs) using…”
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Conference Proceeding Journal Article -
9
Reduced energy-angle dispersion of output electrons from a nanocrystalline Si emitter with a monolayergraphene surface electrode
Published in 2018 31st International Vacuum Nanoelectronics Conference (IVNC) (01-07-2018)“…It is shown that the angle dispersions of output electrons of nanocrystalline silicon (nc-Si) quasiballistic electron emitter are significantly reduced by…”
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Conference Proceeding -
10
Conduction mechanism of single-electron transistors fabricated by field-emission-induced electromigration
Published in 2013 IEEE 5th International Nanoelectronics Conference (INEC) (01-01-2013)“…We report the conduction mechanism of the single-electron transistors (SETs) fabricated by field-emission-induced electromigration, which is so-called…”
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Conference Proceeding Journal Article -
11
Nanoscale mechanical scratching of graphene using scanning probe microscopy
Published in 2013 IEEE 5th International Nanoelectronics Conference (INEC) (01-01-2013)“…Nanolithography of graphene surfaces using scanning probe microscopy (SPM) scratching with a diamond-coated tip was systematically investigated. The graphene…”
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Conference Proceeding Journal Article -
12
In-situ temperature measurements of Joule-heated graphene using near-infrared CCD imaging system
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01-08-2013)“…We report temperature distribution of graphene during Joule heating process using in-situ near-infrared (NIR) charge-coupled device (CCD) imaging system…”
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Conference Proceeding Journal Article -
13
Tuning of resistance of nanogaps using field-emission-induced electromigration with feedback control scheme
Published in 2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) (01-08-2013)“…We report a newly investigated technique for the tuning of tunnel resistance of nanogaps using electromigration phenomena induced by a field emission current,…”
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Conference Proceeding Journal Article -
14
In-situ control of quantum point contacts using scanning probe microscopy scratch lithography
Published in 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) (01-08-2012)“…Quantum point contacts (QPCs) are formed by mechanically scratching Au channels with a scanning probe microscope (SPM) in ambient condition. A variation of…”
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Conference Proceeding