Search Results - "Stemme, E."

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  1. 1

    Micromachined flat-walled valveless diffuser pumps by Olsson, A., Enoksson, P., Stemme, G., Stemme, E.

    Published in Journal of microelectromechanical systems (01-06-1997)
    “…The first valveless diffuser pump fabricated using the latest technology in deep reactive ion etching (DRIE) is presented. The pump was fabricated in a…”
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    Journal Article
  2. 2

    A static turbine flow meter with a micromachined silicon torque sensor by Svedin, N., Stemme, E., Stemme, G.

    Published in Journal of microelectromechanical systems (01-12-2003)
    “…A new class of flow sensors is introduced where a static turbine converts the volume flow into a torque. The structure consists of a turbine fixed to a torque…”
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    Journal Article
  3. 3

    A silicon resonant sensor structure for Coriolis mass-flow measurements by Enoksson, P., Stemme, G., Stemme, E.

    Published in Journal of microelectromechanical systems (01-06-1997)
    “…We present the first mass-flow sensor in silicon, based on the Coriolis-force principle. The sensor consists of a double-loop tube resonator structure with a…”
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    Journal Article
  4. 4

    A new silicon gas-flow sensor based on lift force by Svedin, N., Kalvesten, E., Stemme, E., Stemme, G.

    Published in Journal of microelectromechanical systems (01-09-1998)
    “…This paper presents the first silicon-flow sensor based on lift force. The sensor is a bulk-micromachined airfoil structure that uses the lift force as a…”
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    Journal Article
  5. 5

    Vibration modes of a resonant silicon tube density sensor by Enoksson, P., Stemme, G., Stemme, E.

    Published in Journal of microelectromechanical systems (01-03-1996)
    “…We present an investigation of the resonance parameters for a new sensor for on-line measurements of fluid density. The sensor consists of a tube system made…”
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    Journal Article
  6. 6

    Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps by Olsson, Anders, Stemme, Göran, Stemme, Erik

    Published in Sensors and actuators. A. Physical. (01-08-2000)
    “…An investigation of flat-walled diffuser elements for valve-less micropumps is presented. The diffuser element is a small angle flow channel with a rounded…”
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    Journal Article
  7. 7

    A balanced dual-diaphragm resonant pressure sensor in silicon by Stemme, E., Stemme, G.

    Published in IEEE transactions on electron devices (01-03-1990)
    “…The design and fabrication of a resonant differential pressure sensor is described. The vibrating part consists of a dual-diaphragm structure suspended inside…”
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    Journal Article
  8. 8

    Diffuser-element design investigation for valve-less pumps by Olsson, Anders, Stemme, Go¨ran, Stemme, Erik

    Published in Sensors and actuators. A. Physical. (01-11-1996)
    “…The flow-directing properties of several micromachined diffuser elements with different lengths and opening angles for valve-less micropumps have been…”
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    Journal Article
  9. 9

    A static turbine flow meter with a micromachined silicon torque sensor by Svedin, N., Stemme, E., Stemme, G.

    Published in MEMS 2001 (2001)
    “…A new class of flow sensors is introduced where a static turbine converts the volume flow into a torque. In contrast to conventional turbine meters, the wheel…”
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    Conference Proceeding
  10. 10

    The piezoelectric capillary injector-A new hydrodynamic method for dot pattern generation by Stemme, E., Larsson, S.-G.

    Published in IEEE transactions on electron devices (01-01-1973)
    “…When liquid is driven in pulses through two small apertures with liquid between them, there is a hydrodynamic pumping phenomena in the liquid flow. The…”
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    Journal Article
  11. 11

    Simulation studies of diffuser and nozzle elements for valve-less micropumps by Olsson, A., Stemme, G., Stemme, E.

    “…This paper presents CFD-simulations of different diffuser elements used in valve-less diffuser pumps and nozzle elements used in dynamic micropumps. The…”
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    Conference Proceeding
  12. 12

    A new bi-directional gas-flow sensor based on lift force by Svedin, N., Stemme, E., Stemme, G.

    “…A new bi-directional silicon gas-flow sensor based on lift force has been designed and tested. The lift force deflects an airfoil structure and the deflection…”
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    Conference Proceeding
  13. 13
  14. 14

    Micromachined diffuser/nozzle elements for valve-less pumps by Olsson, A., Stemme, G., Stemme, E.

    “…We present an investigation of the flow directing properties of several micromachined diffuser elements with different lengths and opening angles for…”
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    Conference Proceeding
  15. 15

    Silicon tube structures for a fluid-density sensor by Enoksson, Peter, Stemme, Göran, Stemme, Erik

    Published in Sensors and actuators. A. Physical. (01-06-1996)
    “…The influence on sensor performance of the dimensions of the first resonant silicon tube structure for measuring liquid fluid density is tested with regard to…”
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    Journal Article
  16. 16

    A lift-force flow sensor designed for acceleration insensitivity by Svedin, Niklas, Kälvesten, Edvard, Stemme, Erik, Stemme, Göran

    Published in Sensors and actuators. A, Physical (15-06-1998)
    “…A silicon gas-flow sensor based on lift force is described. The sensing structure is made of two equal plates arranged to be deflected by the lift force. The…”
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    Journal Article Conference Proceeding
  17. 17

    Fluid density sensor based on resonance vibration by Enoksson, Peter, Stemme, Göran, Stemme, Erik

    “…This paper presents the first silicon tube resonant fluid density sensor. The sensor is based on a tube system which is vibrated in a selected balanced mixed…”
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    Journal Article Conference Proceeding
  18. 18
  19. 19

    The first valve-less diffuser gas pump by Olsson, A., Stemme, G., Stemme, E.

    “…The first valve-less gas pump based on the fluid directing properties of diffusers has been fabricated and tested. The pump, fabricated in brass, consists of…”
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    Conference Proceeding
  20. 20

    A Coriolis mass flow sensor structure in silicon by Enoksson, P., Stemme, G., Stemme, E.

    “…The first mass flow sensor in silicon based on the Coriolis force principle is presented. The basic sensor structure consists of a double-loop tube structure…”
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    Conference Proceeding