Search Results - "Stemme, E."
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1
Micromachined flat-walled valveless diffuser pumps
Published in Journal of microelectromechanical systems (01-06-1997)“…The first valveless diffuser pump fabricated using the latest technology in deep reactive ion etching (DRIE) is presented. The pump was fabricated in a…”
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Journal Article -
2
A static turbine flow meter with a micromachined silicon torque sensor
Published in Journal of microelectromechanical systems (01-12-2003)“…A new class of flow sensors is introduced where a static turbine converts the volume flow into a torque. The structure consists of a turbine fixed to a torque…”
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Journal Article -
3
A silicon resonant sensor structure for Coriolis mass-flow measurements
Published in Journal of microelectromechanical systems (01-06-1997)“…We present the first mass-flow sensor in silicon, based on the Coriolis-force principle. The sensor consists of a double-loop tube resonator structure with a…”
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Journal Article -
4
A new silicon gas-flow sensor based on lift force
Published in Journal of microelectromechanical systems (01-09-1998)“…This paper presents the first silicon-flow sensor based on lift force. The sensor is a bulk-micromachined airfoil structure that uses the lift force as a…”
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Journal Article -
5
Vibration modes of a resonant silicon tube density sensor
Published in Journal of microelectromechanical systems (01-03-1996)“…We present an investigation of the resonance parameters for a new sensor for on-line measurements of fluid density. The sensor consists of a tube system made…”
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Journal Article -
6
Numerical and experimental studies of flat-walled diffuser elements for valve-less micropumps
Published in Sensors and actuators. A. Physical. (01-08-2000)“…An investigation of flat-walled diffuser elements for valve-less micropumps is presented. The diffuser element is a small angle flow channel with a rounded…”
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Journal Article -
7
A balanced dual-diaphragm resonant pressure sensor in silicon
Published in IEEE transactions on electron devices (01-03-1990)“…The design and fabrication of a resonant differential pressure sensor is described. The vibrating part consists of a dual-diaphragm structure suspended inside…”
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Journal Article -
8
Diffuser-element design investigation for valve-less pumps
Published in Sensors and actuators. A. Physical. (01-11-1996)“…The flow-directing properties of several micromachined diffuser elements with different lengths and opening angles for valve-less micropumps have been…”
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Journal Article -
9
A static turbine flow meter with a micromachined silicon torque sensor
Published in MEMS 2001 (2001)“…A new class of flow sensors is introduced where a static turbine converts the volume flow into a torque. In contrast to conventional turbine meters, the wheel…”
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Conference Proceeding -
10
The piezoelectric capillary injector-A new hydrodynamic method for dot pattern generation
Published in IEEE transactions on electron devices (01-01-1973)“…When liquid is driven in pulses through two small apertures with liquid between them, there is a hydrodynamic pumping phenomena in the liquid flow. The…”
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Journal Article -
11
Simulation studies of diffuser and nozzle elements for valve-less micropumps
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)“…This paper presents CFD-simulations of different diffuser elements used in valve-less diffuser pumps and nozzle elements used in dynamic micropumps. The…”
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Conference Proceeding -
12
A new bi-directional gas-flow sensor based on lift force
Published in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (1997)“…A new bi-directional silicon gas-flow sensor based on lift force has been designed and tested. The lift force deflects an airfoil structure and the deflection…”
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Conference Proceeding -
13
Vibration mode investigation of a resonant silicon tube structure for use as a fluid density sensor
Published in Proceedings IEEE Micro Electro Mechanical Systems. 1995 (1995)Get full text
Conference Proceeding -
14
Micromachined diffuser/nozzle elements for valve-less pumps
Published in Proceedings of Ninth International Workshop on Micro Electromechanical Systems (1996)“…We present an investigation of the flow directing properties of several micromachined diffuser elements with different lengths and opening angles for…”
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Conference Proceeding -
15
Silicon tube structures for a fluid-density sensor
Published in Sensors and actuators. A. Physical. (01-06-1996)“…The influence on sensor performance of the dimensions of the first resonant silicon tube structure for measuring liquid fluid density is tested with regard to…”
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Journal Article -
16
A lift-force flow sensor designed for acceleration insensitivity
Published in Sensors and actuators. A, Physical (15-06-1998)“…A silicon gas-flow sensor based on lift force is described. The sensing structure is made of two equal plates arranged to be deflected by the lift force. The…”
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Journal Article Conference Proceeding -
17
Fluid density sensor based on resonance vibration
Published in Sensors and actuators. A, Physical (1995)“…This paper presents the first silicon tube resonant fluid density sensor. The sensor is based on a tube system which is vibrated in a selected balanced mixed…”
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Journal Article Conference Proceeding -
18
A valve-less planar fluid pump with two pump chamber
Published in Sensors and actuators. A, Physical (1995)Get full text
Conference Proceeding -
19
The first valve-less diffuser gas pump
Published in Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (1997)“…The first valve-less gas pump based on the fluid directing properties of diffusers has been fabricated and tested. The pump, fabricated in brass, consists of…”
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Conference Proceeding -
20
A Coriolis mass flow sensor structure in silicon
Published in Proceedings of Ninth International Workshop on Micro Electromechanical Systems (1996)“…The first mass flow sensor in silicon based on the Coriolis force principle is presented. The basic sensor structure consists of a double-loop tube structure…”
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Conference Proceeding