Search Results - "Stals, W.T.M."

Radiative wafer heating during plasma deposition process by Bosch, R. C. M., Kant, C. H., van Erven, A. J. M., Stals, W. T. M., Bijker, M. D.

“…Wafer heating with visible and infrared radiation is a well established method used in plasma deposition reactors used for solar cell production. A detailed…”
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Infrared Heating with Opaque Quartz Reflector Technology by Kant, C.H., van Erven, A.J.M., Bosch, R.C.M., Stals, W.T.M., Bijker, M.D.

“…To ensure the performance of the OTB solar deposition tools, we utilize a novel opaque quartz reflector technology for our short-wave infrared lamps. The…”
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Plasma properties of a novel commercial plasma source for high-throughput processing of c-Si solar cells by van den Oever, P.J., Kessels, W.M.M., Hoex, B., Bosch, R.C.M., van Erven, A.J.M., Pennings, R.L.J.R., Stals, W.T.M., Bijker, M.D., van de Sanden, M.C.M.

“…A novel commercial plasma source for high-throughput processing of crystalline silicon solar cells is presented. In this paper, the plasma properties of this…”
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