Search Results - "St mpel, J."

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    Realisation and metrological characterisation of thickness standards below 100 nm by Thomsen-Schmidt, P., Hasche, K., Ulm, G., Herrmann, K., Krumrey, M., Ade, G., St mpel, J., Busch, I., Sch dlich, S., Schindler, A., Frank, W., Hirsch, D., Procop, M., Beck, U.

    “…High-accuracy film thickness measurements in the range below 100 nm can be made by various complex methods like spectral ellipsometry (SE), scanning force…”
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    Journal Article
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