Search Results - "Srikar, V.T."

The reliability of microelectromechanical systems (MEMS) in shock environments by Srikar, V.T., Senturia, S.D.

“…As a first step toward formulating guidelines for the design of dynamically reliable MEMS, we analyze the mechanical response of, and formulate failure…”
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Thermoelastic damping in fine-grained polysilicon flexural beam resonators by Srikar, V.T., Senturia, S.D.

“…The design and fabrication of polysilicon flexural beam resonators with very high mechanical quality factors (Q) is essential for many MEMS applications. Based…”
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Micro-Raman measurement of bending stresses in micromachined silicon flexures by Srikar, V.T., Swan, A.K., Unlu, M.S., Goldberg, B.B., Spearing, S.M.

“…Micron-scale characterization of mechanical stresses is essential for the successful design and operation of many micromachined devices. Here we report the use…”
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Structural design considerations for micromachined solid-oxide fuel cells by Srikar, V.T, Turner, Kevin T, Andrew Ie, Tze Yung, Spearing, S.Mark

“…Micromachined solid-oxide fuel cells (μSOFCs) are among a class of devices being investigated for portable power generation. Optimization of the performance…”
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Materials selection in micromechanical design: an application of the Ashby approach by Srikar, V.T., Spearing, S.M.

“…The set of materials available to microsystems designers is rapidly expanding. Techniques now exist to introduce and integrate a large number of metals,…”
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Fluidic packaging of microengine and microrocket devices for high-pressure and high-temperature operation by Peles, Y., Srikar, V.T., Harrison, T.S., Protz, C., Mracek, A., Spearing, S.M.

“…The fluidic packaging of Power MEMS devices such as the MIT microengine and microrocket requires the fabrication of hermetic seals capable of withstanding…”
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Dislocation pile-ups as sites for formation of electromigration-induced transgranular slit-like voids in Al interconnects by Srikar, V.T, Thompson, C.V

“…Interaction of stress-relief induced crystallographic defecs with translating erosion voids to cause a transition to slit-like void shapes has been shown to be…”
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Materials selection for microfabricated electrostatic actuators by Srikar, V.T., Spearing, S.M.

“…Microfabricated electrostatic actuators are employed in a wide variety of microelectromechanical systems (MEMS) for applications ranging from relays and…”
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Controlled modification of micromachined silicon surfaces using colloidal micro-and nanoparticles by Srikar, V.T., Peles, Y., Arana, L.R., Spearing, S.M.

“…We report a processing technique, based on convective self-assembly, to form densely packed, ordered, arrays of colloidal micro-and nanoparticles on the…”
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