Search Results - "Spassov, D."
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A comparative study of charge trapping in HfO2/Al2O3 and ZrO2/Al2O3 based multilayered metal/high-k/oxide/Si structures
Published in Thin solid films (01-09-2016)“…The electrical properties of multilayered HfO2/Al2O3/HfO2/SiO2 and ZrO2/Al2O3/ZrO2/SiO2 metal-oxide semiconductor capacitors were investigated in order to…”
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2
High-k HfO2-Ta2O5 mixed layers: Electrical characteristics and mechanisms of conductivity
Published in Microelectronic engineering (01-04-2010)“…The electrical properties of mixed HfO2-Ta2O5 films (10; 15 nm) deposited by rf sputtering on Si were studied from the viewpoint of their applications as…”
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3
Doped Ta2O5 and mixed HfO2–Ta2O5 films for dynamic memories applications at the nanoscale
Published in Microelectronics and reliability (01-04-2012)“…The doping of Ta2O5 films with a proper element or its mixing with another high-k dielectric as a breakthrough to extend the potential of Ta2O5 toward meeting…”
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4
X-ray photoelectron spectroscopy of thermal thin Ta2O5 films on Si
Published in Applied surface science (01-09-1998)“…X-ray photoelectron spectra (XPS) have been recorded for thermally grown thin tantalum pentoxide films on Si. The peak decomposition technique was employed to…”
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5
Lightly Al-doped Ta2O5: Electrical properties and mechanisms of conductivity
Published in Microelectronics and reliability (01-12-2011)Get full text
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6
Time-dependent-dielectric-breakdown characteristics of Hf-doped Ta2O5/SiO2 stack
Published in Microelectronics and reliability (01-02-2014)“…[Display omitted] •Hf-doped Ta2O5 exhibits improved TDDB characteristics with respect to the pure Ta2O5.•The hard breakdown in Hf-doped Ta2O5 is a complex…”
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Electrical characteristics of Ti-doped Ta2O5 stacked capacitors
Published in Thin solid films (01-10-2008)Get full text
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Electrical characteristics of Ta2O5 based capacitors with different gate electrodes
Published in Applied physics. A, Materials science & processing (2006)Get full text
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9
A tumor-suppressing function in the epithelial adhesion protein Trask
Published in Oncogene (26-01-2012)“…Trask/CDCP1 is a transmembrane glycoprotein widely expressed in epithelial tissues whose functions are just beginning to be understood, but include a role as…”
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Composition of Ta2O5 stacked films on N2O- and NH3-nitrided Si
Published in Applied surface science (30-12-2006)“…The composition and microstructure of rf sputtered 20 nm Ta2O5 on N2O or NH3 Rapid Thermal Nitrided (RTN) Si substrates have been investigated by X-ray…”
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11
Constant current stress-induced leakage current in mixed HfO2-Ta2O5 stacks
Published in Microelectronics and reliability (01-06-2010)Get full text
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12
Conducting and topographic AFM analysis of Hf-doped and Al-doped Ta2O5 films
Published in Thin solid films (01-09-2011)“…A conductive atomic force microscopy (C-AFM) has been used to study conductivity and electrical degradation of ultrathin (4nm) Hf- and Al-doped Ta2O5 at the…”
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13
Constant current stress of lightly Al-doped Ta2O5
Published in Materials science in semiconductor processing (01-02-2012)“…The response of lightly Al-doped Ta2O5 stacked films (6nm) to constant current stress (CCS) under gate injection (current stress in the range of 1 to 30mA/cm2…”
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14
Influence of the metal electrode on the characteristics of thermal Ta2O5 capacitors
Published in Microelectronic engineering (01-10-2006)“…The effect of various electrodes (Al, W, TiN) deposited by evaporation (Al) and sputtering (W, TiN) on the electrical characteristics of thermal thin film…”
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15
Conduction mechanisms in Ta2O5 stack in response to rapid thermal annealing
Published in Microelectronic engineering (2008)“…The influence of the rapid thermal annealing (RTA) in vacuum at 1000 deg C on the leakage current characteristics and conduction mechanisms in thermal Ta2O5…”
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16
Hf-doped Ta2O5 stacks under constant voltage stress
Published in Microelectronic engineering (01-03-2011)“…The stress-induced leakage current in Hf-doped Ta2O5 layers (7; 10nm) under constant voltage stress at gate injection was investigated in order to assess the…”
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17
Optimization of HfO2/Al2O3 Dielectric Stacks for Charge Trapping Memories
Published in 2021 IEEE 32nd International Conference on Microelectronics (MIEL) (12-09-2021)“…In this work, a summary of our recent studies on the potential of HfO2/ AhO3 nanolaminated stacks to be implemented as charge storage layers in CTMs is…”
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Conference Proceeding -
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Trap parameters and conduction mechanism in HfO2-Ta2O5 mixed stacks in response to microwave irradiation
Published in Microelectronic engineering (01-11-2010)“…The effect of microwave treatment at room temperature on the leakage current and conductivity mechanisms in mixed HfO2-Ta2O5 (10 nm) stacks was studied by…”
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Metal gates and gate-deposition-induced defects in Ta2O5 stack capacitors
Published in Microelectronics and reliability (01-12-2007)Get full text
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20
Stress in boron nitride nanofilms prepared by rapid thermal annealing
Published in Journal of Optoelectronics and Advanced Materials (01-10-2009)“…Boron Nitride (BN) nanofilms (5-7 nm) were prepared by Rapid Thermal Annealing (RTA) of boron layers deposited on sapphire (AI(20O(3)) substrates in NH(3)…”
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