Search Results - "Soon, Bo Woon"

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  1. 1

    Finite-Time Task-Space Coordinated Tracking of Networked Robotic Manipulators With Uncertain Dynamics and Disturbances by Feng, Zhi, Hu, Guoqiang, Sun, Yajuan, Bo Woon Soon, Jeffrey

    “…This article investigates task-space coordinated tracking in a finite time for networked robotic manipulators under uncertain dynamics and external…”
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    Journal Article
  2. 2

    Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators by Gu, Xiyu, Liu, Yan, Qu, Yuanhang, Wei, Min, Chen, Xiang, Wang, Yaxin, Liu, Wenjuan, Pi, Bensong, Woon Soon, Bo, Cai, Yao, Guo, Shishang, Sun, Chengliang

    Published in Composite structures (15-07-2024)
    “…With the development of MEMS technology to the nanometer scale, the influence of different process conditions on the performance of nano-devices can be…”
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    Journal Article
  3. 3

    Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators by Cassella, Cristian, Singh, Navab, Bo Woon Soon, Piazza, Gianluca

    Published in Journal of microelectromechanical systems (01-10-2015)
    “…This paper investigates the dependence of the quality factor (Q) of AlN contour mode resonators (CMRs) on the characteristics of the inactive regions located…”
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    Journal Article
  4. 4

    Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter by Zou, Yang, Cai, Yao, Gao, Chao, Luo, Tiancheng, Liu, Yan, Xu, Qinwen, Wang, Yaxin, Nian, Laixia, Liu, Wenjuan, Soon, Jeffrey Bo Woon, Sun, Chengliang

    Published in Journal of microelectromechanical systems (01-06-2023)
    “…The demand for filters with a large fractional bandwidth, up to 5%, still puts a great challenge to the typical aluminum nitride (AlN) thin films-based bulk…”
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    Journal Article
  5. 5

    Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectromechanical Switches by Qian, You, Soon, Bo Woon, Lee, Chengkuo

    Published in Journal of microelectromechanical systems (01-12-2015)
    “…We designed a one-mask process for all-molybdenum-based laterally actuated nanoelectromechanical switches. The damascene-like process is designed to ensure a…”
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    Journal Article
  6. 6

    Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film by Xie, Ying, Liu, Yan, Liu, Jieyu, Wang, Lei, Liu, Wenjuan, Soon, Bo Woon, Cai, Yao, Sun, Chengliang

    Published in Micromachines (Basel) (18-04-2022)
    “…A resonator with an appropriate electromechanical coupling coefficient (Kt2) is crucial for filter applications in radio communication. In this paper, we…”
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    Journal Article
  7. 7

    Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications by Zou, Yang, Gao, Chao, Zhou, Jie, Liu, Yan, Xu, Qinwen, Qu, Yuanhang, Liu, WenJuan, Soon, Jeffrey Bo Woon, Cai, Yao, Sun, Chengliang

    Published in Microsystems & nanoengineering (29-11-2022)
    “…Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard…”
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    Journal Article
  8. 8

    Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C by Bo Woon Soon, You Qian, Ng, Eldwin J., Hong, Vu A., Yushi Yang, Chae Hyuck Ahn, Kenny, Thomas W., Chengkuo Lee

    Published in Journal of microelectromechanical systems (01-12-2015)
    “…We report on characterization of Si-to-Si contact microswitches fabricated in an ultraclean encapsulation process. This three-terminal microswitch relies on a…”
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    Journal Article
  9. 9

    Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice by Nan Wang, Tsai, J. M.-L, Fu-Li Hsiao, Bo Woon Soon, Dim-Lee Kwong, Palaniapan, M., Chengkuo Lee

    Published in Journal of microelectromechanical systems (01-08-2012)
    “…Phononic crystal (PnC) resonators of Bloch-mode resonance made by replacing periodically arranged two or three rows of air holes with one row of air holes on a…”
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    Journal Article
  10. 10

    Optimized response of AlN stack for chipscale GHz ultrasonics by Hoople, J., Kuo, J., Soon Bo Woon, J., Singh, N., Lal, A.

    “…In this paper we present designs of an aluminum nitride (AlN) based transducer stack for ultrasonic transmit/receive applications integrated in silicon. By…”
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    Conference Proceeding
  11. 11

    Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors by Liu, Yan, Lin, Binghui, Xie, Ying, Soon, Bo Woon, Cai, Yao, He, Jun, Sun, Chengliang

    “…Surface acoustic wave (SAW) resonators based on AlN/ScAlN composite thin films with dual reflection structure demonstrate substantial improvement in acoustic…”
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    Journal Article
  12. 12

    Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure by Qu, Yuanhang, Gu, Xiyu, Zou, Yang, Wen, Zhiwei, Cai, Yao, Soon, Bo Woon, Liu, Yan, Sun, Chengliang

    Published in Journal of microelectromechanical systems (01-04-2023)
    “…In order to reduce the lateral acoustic energy loss of thin film bulk acoustic resonators (FBARs), the trench structure for FBAR is generally designed to block…”
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    Journal Article
  13. 13

    Investigation of film bulk acoustic resonators for sensing applications in liquid environment by Zhou, Yu, Zou, Yang, Gao, Chao, Xu, Qinwen, Tong, Xin, Lin, Binghui, Liu, Yan, Soon, Bo Woon, Cai, Yao, Sun, Chengliang

    Published in Applied physics letters (21-11-2022)
    “…The thin film bulk acoustic resonator (FBAR) has emerged as a promising choice for liquid sensors because of its high frequency and sensitivity. To investigate…”
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    Journal Article
  14. 14

    Suspended 2-D photonic crystal aluminum nitride membrane reflector by Ho, Chong Pei, Pitchappa, Prakash, Soon, Bo Woon, Lee, Chengkuo

    Published in Optics express (20-04-2015)
    “…We experimentally demonstrated a free-standing two-dimensional (2-D) photonic crystal (PhC) aluminum nitride (AlN) membrane to function as a free space (or…”
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    Journal Article
  15. 15

    Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient by Wen, Zhiwei, Xu, Qinwen, Liu, Jieyu, Qu, Yuanhang, Liu, Yan, Liu, Wenjuan, Soon, Bo Woon, Cai, Yao, Sun, Chengliang

    Published in Japanese Journal of Applied Physics (01-11-2022)
    “…Abstract This paper reports on a design journey for a laterally-excited bulk acoustic wave resonator (XBAR) with an adjustable piezoelectric coupling…”
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    Journal Article
  16. 16

    Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN Lamb wave resonators by Sun, Chengliang, Soon, Bo Woon, Zhu, Yao, Wang, Nan, Loke, Samuel Pei Hao, Mu, Xiaojing, Tao, Jifang, Gu, Alex Yuandong

    Published in Applied physics letters (22-06-2015)
    “…An AlN piezoelectric Lamb-wave resonator, which is excited by two dimensional electric field, is reported in this paper. Rhombus-shape electrodes are arranged…”
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    Journal Article
  17. 17

    Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator by Tong, Xin, Liu, Jieyu, Zhou, Jie, Xu, Qinwen, Lin, Binghui, Liu, Yan, Soon, Bo Woon, Liu, Wenjuan, Cai, Yao, Sun, Chengliang

    Published in Japanese Journal of Applied Physics (01-12-2022)
    “…Abstract The effective electromechanical coupling coefficient ( K eff 2 ) is one of the crucial parameters to evaluate the performance of resonators. However,…”
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    Journal Article
  18. 18

    Silicon-to-silicon microswitch with wide operation temperature range by Bo Woon Soon, You Qian, Ng, Eldwin J., Kenny, Thomas W., Chengkuo Lee

    “…Using an ultra-clean vacuum sealing process, an encapsulated Si-to-Si contact micro switch is fabricated and characterized. This three-terminal micro switch…”
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    Conference Proceeding
  19. 19

    A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications by Bo Woon Soon, Singh, Navab, Tsai, Julius Minglin, Chengkuo Lee

    “…We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain…”
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    Conference Proceeding
  20. 20

    Application of statistical element selection to 3D integrated AlN MEMS filters for performance correction and yield enhancement by Patterson, Albert, Calayir, Enes, Fedder, Gary K., Piazza, Gianluca, Bo Woon Soon, Singh, Navab

    “…By 3D integration of an array of 12 nominally identical AlN MEMS sub-filters with a CMOS switching matrix and application of statistical element selection to…”
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    Conference Proceeding