Search Results - "Soon, Bo Woon"
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1
Finite-Time Task-Space Coordinated Tracking of Networked Robotic Manipulators With Uncertain Dynamics and Disturbances
Published in IEEE transactions on control of network systems (01-09-2021)“…This article investigates task-space coordinated tracking in a finite time for networked robotic manipulators under uncertain dynamics and external…”
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2
Analysis of lattice deformation originated from residual stress on performance of aluminum nitride-based bulk acoustic wave resonators
Published in Composite structures (15-07-2024)“…With the development of MEMS technology to the nanometer scale, the influence of different process conditions on the performance of nano-devices can be…”
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3
Quality Factor Dependence on the Inactive Regions in AlN Contour-Mode Resonators
Published in Journal of microelectromechanical systems (01-10-2015)“…This paper investigates the dependence of the quality factor (Q) of AlN contour mode resonators (CMRs) on the characteristics of the inactive regions located…”
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4
Design, Fabrication, and Characterization of Aluminum Scandium Nitride-Based Thin Film Bulk Acoustic Wave Filter
Published in Journal of microelectromechanical systems (01-06-2023)“…The demand for filters with a large fractional bandwidth, up to 5%, still puts a great challenge to the typical aluminum nitride (AlN) thin films-based bulk…”
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5
Pull-In Voltage and Fabrication Yield Analysis of All-Metal-Based Nanoelectromechanical Switches
Published in Journal of microelectromechanical systems (01-12-2015)“…We designed a one-mask process for all-molybdenum-based laterally actuated nanoelectromechanical switches. The damascene-like process is designed to ensure a…”
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6
Tunable Electromechanical Coupling Coefficient of a Laterally Excited Bulk Wave Resonator with Composite Piezoelectric Film
Published in Micromachines (Basel) (18-04-2022)“…A resonator with an appropriate electromechanical coupling coefficient (Kt2) is crucial for filter applications in radio communication. In this paper, we…”
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7
Aluminum scandium nitride thin-film bulk acoustic resonators for 5G wideband applications
Published in Microsystems & nanoengineering (29-11-2022)“…Bulk acoustic wave (BAW) filters have been extensively used in consumer products for mobile communication systems due to their high performance and standard…”
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8
Investigation of a Vacuum Encapsulated Si-to-Si Contact Microswitch Operated From −60 °C to 400 °C
Published in Journal of microelectromechanical systems (01-12-2015)“…We report on characterization of Si-to-Si contact microswitches fabricated in an ultraclean encapsulation process. This three-terminal microswitch relies on a…”
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9
Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice
Published in Journal of microelectromechanical systems (01-08-2012)“…Phononic crystal (PnC) resonators of Bloch-mode resonance made by replacing periodically arranged two or three rows of air holes with one row of air holes on a…”
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10
Optimized response of AlN stack for chipscale GHz ultrasonics
Published in 2015 IEEE International Ultrasonics Symposium (IUS) (01-10-2015)“…In this paper we present designs of an aluminum nitride (AlN) based transducer stack for ultrasonic transmit/receive applications integrated in silicon. By…”
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Conference Proceeding -
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Boosting Performance of SAW Resonator via AlN/ScAlN Composite Films and Dual Reflectors
Published in IEEE transactions on ultrasonics, ferroelectrics, and frequency control (01-10-2023)“…Surface acoustic wave (SAW) resonators based on AlN/ScAlN composite thin films with dual reflection structure demonstrate substantial improvement in acoustic…”
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12
Aluminum Nitride Based Film Bulk Acoustic Resonator With Anchor Column Structure
Published in Journal of microelectromechanical systems (01-04-2023)“…In order to reduce the lateral acoustic energy loss of thin film bulk acoustic resonators (FBARs), the trench structure for FBAR is generally designed to block…”
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13
Investigation of film bulk acoustic resonators for sensing applications in liquid environment
Published in Applied physics letters (21-11-2022)“…The thin film bulk acoustic resonator (FBAR) has emerged as a promising choice for liquid sensors because of its high frequency and sensitivity. To investigate…”
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14
Suspended 2-D photonic crystal aluminum nitride membrane reflector
Published in Optics express (20-04-2015)“…We experimentally demonstrated a free-standing two-dimensional (2-D) photonic crystal (PhC) aluminum nitride (AlN) membrane to function as a free space (or…”
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15
Laterally-excited bulk acoustic wave resonator with an adjustable piezoelectric coupling coefficient
Published in Japanese Journal of Applied Physics (01-11-2022)“…Abstract This paper reports on a design journey for a laterally-excited bulk acoustic wave resonator (XBAR) with an adjustable piezoelectric coupling…”
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16
Methods for improving electromechanical coupling coefficient in two dimensional electric field excited AlN Lamb wave resonators
Published in Applied physics letters (22-06-2015)“…An AlN piezoelectric Lamb-wave resonator, which is excited by two dimensional electric field, is reported in this paper. Rhombus-shape electrodes are arranged…”
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17
Influence of electrode metallization rate on the effective electromechanical coefficient of AlN checker-mode lamb wave resonator
Published in Japanese Journal of Applied Physics (01-12-2022)“…Abstract The effective electromechanical coupling coefficient ( K eff 2 ) is one of the crucial parameters to evaluate the performance of resonators. However,…”
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18
Silicon-to-silicon microswitch with wide operation temperature range
Published in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) (01-06-2015)“…Using an ultra-clean vacuum sealing process, an encapsulated Si-to-Si contact micro switch is fabricated and characterized. This three-terminal micro switch…”
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Conference Proceeding -
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A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications
Published in The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (01-04-2013)“…We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain…”
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Conference Proceeding -
20
Application of statistical element selection to 3D integrated AlN MEMS filters for performance correction and yield enhancement
Published in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (01-01-2015)“…By 3D integration of an array of 12 nominally identical AlN MEMS sub-filters with a CMOS switching matrix and application of statistical element selection to…”
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Conference Proceeding