Search Results - "Song, Z.X."

Refine Results
  1. 1

    Microstructure and Mechanical Properties of Nanocrystalline Tungsten Thin Films by Sun, H.L., Song, Z.X., Guo, D.G., Ma, F., Xu, K.W.

    “…Tungsten (W) thin films were prepared by magnetron sputtering onto Si (100) substrates. Their microstructures were characterized by X-ray diffraction (XRD),…”
    Get full text
    Journal Article
  2. 2

    The effect of ZrSiN diffusion barrier on the bonding strength of titanium porcelain by Zhang, H., Guo, T.W., Song, Z.X., Wang, X.J., Xu, K.W.

    Published in Surface & coatings technology (01-02-2007)
    “…ZrSiN film was selected as diffusion barrier of titanium porcelain interface and sputtered on polished titanium substrate with RF reactive magnetron…”
    Get full text
    Journal Article Conference Proceeding
  3. 3

    The effect of N2 partial pressure on the properties of Nb-Si-N films by RF reactive magnetron sputtering by SONG, Z. X, WANG, Y, WANG, C. J. F, LIU, C. L, XU, K. W

    Published in Surface & coatings technology (01-02-2007)
    “…Nb-Si-N films were sputtered by RF reactive magnetron sputtering with various N2 partial pressure in argon and nitrogen gas mixture. The characterizers of…”
    Get full text
    Conference Proceeding Journal Article
  4. 4

    Theoretical design and experimental study of the interlayer of Al/Mg bimetallic composite plate by solid-liquid cast rolling by Yang, H.K., Qiu, J., Cao, C., Li, Y.D., Song, Z.X., Liu, W.J.

    “…In this study, to enhance the bonding strength of a solid-liquid cast rolled 6061 Al/AZ31B Mg bimetallic composite plate, an arc-sprayed Zn composite…”
    Get full text
    Journal Article
  5. 5

    Thermal stability of ultra thin Zr-B-N films as diffusion barrier between Cu and Si by Meng, Y., Song, Z.X., Li, Y.H., Qian, D., Hu, W., Xu, K.W.

    Published in Applied surface science (15-10-2020)
    “…Cross-sectional HRTEM micrographs of the Cu/Zr-B-N/Si stacks annealed at (a) 600 °C and (b) 650 °C. [Display omitted] •Ultra-thin amorphous Zr-B-N films 5 nm…”
    Get full text
    Journal Article
  6. 6

    Numerical investigation of the effect of CMAS deposition on the temperature and stress distribution of thermal barrier coatings coated on a turbine blade by Liu, X.H., Zhu, W., Guo, J.W., Song, Z.X., Xiao, Y.Q.

    Published in Aerospace science and technology (01-09-2023)
    “…Particle deposition can cause significant damage to thermal barrier coatings (TBCs) and it is critical to understand the deposition characteristics and the…”
    Get full text
    Journal Article
  7. 7

    Effect of heat treatment variations on the microstructure evolution and mechanical properties in a β metastable Ti alloy by Li, C., Chen, J., Li, W., Ren, Y.J., He, J.J., Song, Z.X.

    Published in Journal of alloys and compounds (05-11-2016)
    “…A β metastable titanium alloy Ti5Al4Zr4Mo2Cr2Sn1Fe with an initial duplex structure was thermally treated to produce a wide range of microstructure. The effect…”
    Get full text
    Journal Article
  8. 8

    Thermal annealing induced mazy structure on MoO3 thin films and their high sensing performance to NO gas at room temperature by Li, Y.X., Song, Z.X., Jiang, F., Sun, Q., Ma, F., Wang, H.R., Chen, K.

    Published in Ceramics international (01-12-2016)
    “…MoS2 thin films were prepared by radio frequency (RF) magnetron sputtering and then annealed in air. X-ray diffraction (XRD), field-emission electron scanning…”
    Get full text
    Journal Article
  9. 9

    Ultrathin ZrBxOy films as diffusion barriers in Cu interconnects by Meng, Y., Song, Z.X., Chen, J.H., Ma, F., Li, Y.H., Wang, J.F., Wang, C.C., Xu, K.W.

    Published in Vacuum (01-09-2015)
    “…Ultra-thin ZrBxOy films 5 nm in thickness were prepared by radio-frequency (rf) magnetron sputtering. The thermal stability and the barrier performance against…”
    Get full text
    Journal Article
  10. 10

    SAR Observation Error Estimation Based on Maximum Relative Projection Matching by Song, Z. X., Fang, Y., Wang, B. P., Zhang, Y.

    “…The existing sparse imaging observation error estimation methods are to usually estimate the error of each observation position by substituting the error…”
    Get full text
    Journal Article
  11. 11

    Thermal stability of RuZr alloy thin films as the diffusion barrier in Cu metallization by Meng, Y., Song, Z.X., Qian, D., Dai, W.J., Wang, J.F., Ma, F., Li, Y.H., Xu, K.W.

    Published in Journal of alloys and compounds (05-03-2014)
    “…•The crystallization of Ru thin films can be suppressed by Zr doping.•Amorphous RuZr thin films were fabricated by magnetron sputtering.•It could be used to…”
    Get full text
    Journal Article
  12. 12

    Interface stability and microstructure of an ultrathin α-Ta/graded Ta(N)/TaN multilayer diffusion barrier by Liu, C.H., Liu, W., Wang, Y.H., Wang, Y., An, Z., Song, Z.X., Xu, K.W.

    Published in Microelectronic engineering (01-10-2012)
    “…An ultrathin α-Ta (5nm)/graded Ta(N) (1.5nm)/TaN (2.5nm) multilayer film covered by Cu film was deposited on the Si substrate using reactive magnetron…”
    Get full text
    Journal Article
  13. 13
  14. 14

    Microstructure, formation mechanism and compression plasticity of regularly faceted Cu particles by Sun, H.L., Song, Z.X., Ma, F., Zhan, J.M., Xu, K.W.

    Published in Scripta materialia (01-03-2009)
    “…Regular submicron-scale Cu particles formed spontaneously by annealing Cu–Zr films. Based on these experimental results, it was speculated that these Cu…”
    Get full text
    Journal Article
  15. 15

    Stress relaxation induced faceted Cu and W particles on the surfaces of Cu–Zr and W thin films by Sun, H.L., Song, Z.X., Ma, F., Xu, K.W.

    Published in Applied surface science (30-08-2009)
    “…Faceted copper and tungsten particles in submicron-scale were obtained by annealing copper–zirconium thin films on polyimide (PI) substrates as well as in the…”
    Get full text
    Journal Article
  16. 16

    The effect of N 2 partial pressure on the properties of Nb–Si–N films by RF reactive magnetron sputtering by Song, Z.X., Wang, Y., Wang, C.J.F., Liu, C.L., Xu, K.W.

    Published in Surface & coatings technology (26-02-2007)
    “…Nb–Si–N films were sputtered by RF reactive magnetron sputtering with various N 2 partial pressure in argon and nitrogen gas mixture. The characterizers of…”
    Get full text
    Journal Article
  17. 17

    The self-formation graded diffusion barrier of Zr/ZrN by Song, Z.X., Wang, J.A., Li, Y.H., Ma, F., Xu, K.W., Guo, S.W.

    Published in Microelectronic engineering (01-03-2010)
    “…In this paper, the 5 nm ZrN diffusion barrier was deposited by high vacuum magnetron sputtering method on Si substrate and the 300 nm Cu(Zr) alloy film or Cu…”
    Get full text
    Journal Article Conference Proceeding
  18. 18

    The characterization of Zr–Si–N diffusion barrier films with different sputtering bias voltage by Song, Z.X., Xu, K.W., Chen, H.

    Published in Thin solid films (01-12-2004)
    “…Zr–Si–N diffusion barriers were sputtered by RF reactive magnetron sputtering with different bias voltage. The Cu films were subsequently sputtered onto the…”
    Get full text
    Journal Article
  19. 19

    Crystalline orientation and surface structure anisotropy of annealed thin tungsten films by Wang, Yuan, Song, Z.X., Ma, Dayan, Wei, X.Y., Xu, Kewei

    Published in Surface & coatings technology (26-02-2007)
    “…The correlation between texture coefficient T 110 and surface structure anisotropy of thin metal film is constructed with an approach of integrating the…”
    Get full text
    Journal Article Conference Proceeding
  20. 20

    The Effect of nitrogen partial pressure on Zr–Si–N diffusion barrier by Song, Z.X, Xu, K.W, Chen, H

    Published in Microelectronic engineering (2004)
    “…The Zr–Si–N diffusion barrier was sputtered on Si wafer with different nitrogen partial pressures by RF reactive magnetron sputtering. The Cu film was…”
    Get full text
    Journal Article