Search Results - "Sohgawa, Masayuki"

Temperature characteristics of a thickness shear mode quartz crystal resonator bonded to a support substrate by Satani, Hajime, Yasuda, Kuraudo, Sohgawa, Masayuki, Abe, Takashi

“…Thickness shear mode (TSM) resonators consisting of metal films and quartz plates are widely used for sensor applications such as film thickness monitoring,…”
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Development of a degradation method for evaluation of edible oils using a contactless quartz crystal complex capacitance sensor by Oshima, Yu, Sohgawa, Masayuki, Abe, Takashi

“…A method for evaluating the degradation of edible oils using a contactless quartz‐based capacitive detector is reported herein. Oils easily oxidize, resulting…”
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The New Control Method for Detection of Cold‐Warm sensation using a Heater Integrated Tactile Sensor by Iwahashi, Takuma, Onda, Naotaka, Nagumo, Hikaru, Abe, Takashi, Sohgawa, Masayuki

“…In recent years, the demand for quantifying the five senses has increased in the industrial and medical fields. In particular, the sense of touch is a complex…”
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Fabrication of a true-Gaussian-shaped quartz crystal resonator by Kutsuwada, Hiroki, Watanabe, Sho, Sohgawa, Masayuki, Abe, Takashi

“…•Fabrication process of a true-Gaussian-shaped quartz crystal resonator was developed using photolithographic methods.•The shape was carefully adjusted by…”
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Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control by Araki, Ryoma, Abe, Takashi, Noma, Haruo, Sohgawa, Masayuki

“…In this paper, in order to perform delicate and advanced grip control like human, a proximity and tactile combination sensor using miniaturized…”
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Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors by Kaneta, Ren, Hasegawa, Takumi, Kido, Jun, Abe, Takashi, Sohgawa, Masayuki

“…We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft…”
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Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor by ARAKI, RYOMA, ABE, TAKASHI, NOMA, HARUO, SOHGAWA, MASAYUKI

“…SUMMARY In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect…”
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Development of time‐delay analysis method of inductance and capacitance for microfluidic circuit by Watanabe, Ryo, Yoshida, Akira, Sato, Yota, Sohgawa, Masayuki, Abe, Takashi

“…In this paper, we report the development of time‐delay analysis method of inductance and capacitance for microfluidic circuit. The sensor used in this method…”
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Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass by Onda, Naotaka, Kozuka, Takaaki, Abe, Takashi, Isshiki, Masanobu, Tomeno, Satoru, Sohgawa, Masayuki

“…The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of…”
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Development of dry‐nano‐polishing technique using reactive ion etching for ultra thin titanium wafer by Chino, Teruya, Watanabe, Yuta, Tsukiyama, Yosuke, Sohgawa, Masayuki, Abe, Takashi

“…In this study, we developed a dry‐nano‐polishing technique using reactive ion etching for ultra thin titanium wafer. The surface of titanium coated with…”
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Tactile Sensor with High-Density Microcantilever and Multiple PDMS Bumps for Contact Detection by Fujihashi, Tomoya, Suga, Fumitoshi, Araki, Ryoma, Kido, Jyun, Abe, Takashi, Sohgawa, Masayuki

“…In the study, we investigated a detection method of partial contact of an object owing to curved or uneven surface of the contact object by a tactile sensor…”
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Development of a self‐heated‐stage for high‐speed process of titanium by reactive ion etching by Kiryu, Yuya, Han, Gang, Imai, Junichi, Sohgawa, Masayuki, Abe, Takashi

“…In this study, we developed a detachable self‐heated‐stage suitable for high‐speed processing of titanium by thermally assisted reactive ion etching (TRIE)…”
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Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor by Ebata, Ryo, Sakai, Ryo, Sohgawa, Masayuki, Abe, Takashi

“…In this article, we developed a compact microdroplet monitoring sensor. This sensor is capacitive sensor combined a microfluidic circuit and a crystal…”
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Ferroelectric and Piezoelectric Properties of Polycrystalline BiFeO3 Thin Films Prepared by Pulsed Laser Deposition under Magnetic Field by Park, Jung Min, Nakashima, Seiji, Sohgawa, Masayuki, Kanashima, Takeshi, Okuyama, Masanori

“…Polycrystalline BiFeO 3 (BFO) thin films have been prepared on Pt/TiO 2 /SiO 2 /Si substrates by using a pulsed laser deposition (PLD) method under a magnetic…”
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Development of Self‐Heated Stage Suitable for Thermal Assist Reactive Ion Etching of the Functional Metals by MURATA, YUKI, HAN, GANG, OHKAWA, DAIKI, IMAI, JUNICHI, SOHGAWA, MASAYUKI, ABE, TAKASHI

“…SUMMARY This paper describes development of self‐heated stage suitable for thermal reactive ion etching (TRIE) of the functional metals. TRIE was evaluated…”
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Evaluation method of fabrics by visual and tactile texture information using MEMS combo sensor by Takahashi, Kenta, Abe, Takashi, Sohgawa, Masayuki, Okuyama, Masanori, Noma, Haruo

“…In this paper, we report texture measurement of the fabrics by a multimodal MEMS sensor. This sensor has sensitivity to both multi-axial force vector and…”
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Preparation of BiFe0.9Co0.1O3 Films by Pulsed Laser Deposition under Magnetic Field by Park, Jung Min, Gotoda, Fumiya, Nakashima, Seiji, Sohgawa, Masayuki, Kanashima, Takeshi, Okuyama, Masanori

“…BiFe 0.9 Co 0.1 O 3 (BFCO) films have been prepared on Pt/TiO 2 /SiO 2 /Si substrates with a magnetic field of 0.4 T by pulsed laser deposition. BFCO films…”
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Preparation of epitaxial BiFeO3 thin films on La-SrTiO3 substrate by using magnetic-field-assisted pulsed laser deposition by Park, Jung Min, Sohgawa, Masayuki, Kanashima, Takeshi, Okuyama, Masanori, Nakashima, Seiji

“…Epitaxial BiFeO 3 (BFO) thin films have been prepared on La-doped (001) SrTiO 3 substrates (La-STO) by using magnetic-field-assisted pulsed laser deposition…”
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Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor by Sohgawa, Masayuki, Nozawa, Akito, Yokoyama, Hokuto, Kanashima, Takeshi, Okuyama, Masanori, Abe, Takashi, Noma, Haruo, Azuma, Teruaki

“…A multimodal sensor with Si micro-cantilever embedded in PDMS elastomer for measurement of proximity and touch forces has been fabricated and characterized. DC…”
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Ferroelectric Properties of Bi1.1Fe1-xCoxO3 Thin Films Prepared by Chemical Solution Deposition Using Iterative Rapid Thermal Annealing in N2 and O2 by Tho, Nguyen Truong, Kanashima, Takeshi, Sohgawa, Masayuki, Ricinschi, Dan, Noda, Minoru, Okuyama, Masanori

“…Ferroelectric Bi 1.1 Fe 1-x Co x O 3 (BFCO) thin films with $x = 0{\mbox{--}}0.3$ have been prepared on Pt/Ti/SiO 2 /Si substrates by chemical solution…”
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