Search Results - "Smaykina, S.V"

Ion-assisted pulsed magnetron sputtering deposition of ta-C films by Bugaev, S.P, Podkovyrov, V.G, Oskomov, K.V, Smaykina, S.V, Sochugov, N.S

“…The process of ion-assisted deposition of ta-C films by pulsed magnetron sputtering of a graphite target has been investigated. Probe measurements of the…”
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Use of the hydrocarbon plasma of a low-pressure arc discharge for deposition of highly adhesive a-C:H films by Bugaev, S.P, Oskomov, K.V, Podkovyrov, V.G, Smaykina, S.V, Sochugov, N.S

“…It has been investigated whether a source of a hydrocarbon plasma generated by a non-self-sustained low-pressure arc discharge is suitable for production of…”
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