Search Results - "Skryl, A. S."

High-resolution terahertz spectroscopy with a single tunable frequency comb by Skryl, A S, Pavelyev, D G, Tretyakov, M Y, Bakunov, M I

“…We report an improvement of three orders of magnitude in the spectral resolution of a recently proposed single-comb terahertz spectroscopy [Opt. Lett.39, 5669…”
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System for illumination of an EUV-nanolithograph mask by Zuev, S. Yu, Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Skryl’, A. S., Strulya, I. L., Toropov, M. N., Chkhalo, N. I.

“…The system for illuminating a mask of the nanolithograph for EUV lithography at the 13.5 nm wavelength is considered. The basic elements of the system are a…”
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Design of the aspheric Schwarzschild lens for a nanolithographer with the operating wavelength λ = 13.5 nm by Salashchenko, N. N., Skryl’, A. S., Toropko, M. N., Chkhalo, N. I.

“…The design of an aspheric Schwarzschild lens applicable to a nanolithographic test bench with an operating wavelength of 13.5 nm is discussed. Lenses with…”
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Two-mirror projection objective of a nanolithographer at λ = 13.5 nm by Zuev, S. Yu, Pestov, A. E., Salashchenko, N. N., Skryl, A. S., Stroulea, I. L., Suslov, L. A., Toropov, M. N., Chkhalo, N. I.

“…We describe a projection objective for a nanolithographer stand with an operating wavelength of λ = 13.5 nm that consists of two aspherical mirrors…”
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Photonic-electronic terahertz frequency comb spectroscopy by Skryl, A. S., Pavelyev, D. G., Bakunov, M. I.

“…We report a new approach to the terahertz frequency comb spectroscopy (TFCS) based on nonlinear mixing of a photonically generated terahertz pulse train with a…”
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