Search Results - "Simons, D. S."
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1
Use of quantum effects as potential qualifying metrics for “quantum grade silicon”
Published in AIP advances (01-12-2019)“…Across solid state quantum information, material deficiencies limit performance through enhanced relaxation, charge defect motion, or isotopic spin noise…”
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2
Summary of ISO/TC 201 standard: XIII, ISO 18114:2003-surface chemical analysis-secondary ion mass spectrometry-determination of relative sensitivity factors from ion-implanted reference materials
Published in Surface and interface analysis (01-03-2006)“…This International Standard specifies a method of determining relative sensitivity factors (RSFs) for secondary ion mass spectrometry (SIMS) from ion‐implanted…”
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3
Epitaxial Si-based tunnel diodes
Published in Thin solid films (22-12-2000)“…Tunneling devices in combination with transistors offer a way to extend the performance of existing technologies by increasing circuit speed and decreasing…”
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4
Secondary ion yield changes in Si and GaAs due to topography changes during O+ 2 or Cs+ ion bombardment
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-1988)“…Changes in secondary ion yields of matrix and dopant species have been correlated with changes in surface topography during O+ 2 bombardment of Si and GaAs. In…”
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5
Atomic hydrogen for the formation of abrupt Sb doping profiles in MBE-grown Si
Published in Thin solid films (26-05-1998)“…Previously, atomic hydrogen has been shown to be effective in reducing the segregation of Ge on Si(100) during solid source molecular beam epitaxy growth. In…”
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6
High precision measurements of arsenic and phosphorous implantation dose in silicon by secondary ion mass spectrometry
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-05-2002)“…The metrology section of the 1999 International Technology Roadmap for Semiconductors specifies in-line dopant profile concentration precision requirements…”
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7
Sb surface segregation and doping in Si(100) grown at reduced temperature by molecular beam epitaxy
Published in Applied physics letters (06-09-1993)“…X-ray photoelectron spectroscopy, depth profiling with secondary ion mass spectrometry, and conductivity measurements have been performed on Sb-doped Si(100)…”
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8
Molecular ion imaging and dynamic secondary-ion mass spectrometry of organic compounds
Published in Analytical chemistry (Washington) (01-10-1990)“…An ion microscope equipped with a resistive anode encoder imaging system has been used to acquire molecular secondary ion images, with lateral resolution on…”
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9
A particulate isotopic standard of uranium and plutonium in an aluminosilicate matrix
Published in Journal of the American Society for Mass Spectrometry (01-09-1994)“…Mixed-actinide microstandard particles have been produced for calibration and performance testing of isotope-ratio mass spectrometers and ion and electron…”
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10
Enhanced Zn diffusion in GaAs pnpn structures: Growth versus annealing
Published in Applied physics letters (04-09-1995)“…Zn diffusivity, DZn in heavily doped pnpn GaAs structures has been measured after growth and annealing. During growth at 650 °C, DZn∼10−12 cm2/s in the buried…”
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11
Repeatability of Si concentration measurements in Si-doped GaN films
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-09-1997)“…In high mass resolution secondary ion mass spectrometry Cs + depth profile measurements of Si in GaN films, the secondary ion intensity ratio of 28 Si − to the…”
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12
Transient enhanced diffusion without {311} defects in low energy B+-implanted silicon
Published in Applied physics letters (02-10-1995)“…Low energy and low dose B+-implanted Si has been studied using transmission electron microscopy (TEM) and secondary ion mass spectrometry (SIMS)…”
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13
Diffusion barrier cladding in Si/SiGe resonant interband tunneling diodes and their patterned growth on PMOS source/drain regions
Published in IEEE transactions on electron devices (01-09-2003)“…Si/SiGe resonant interband tunnel diodes (RITDs) employing /spl delta/-doping spikes that demonstrate negative differential resistance (NDR) at room…”
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14
The growth and characterization of Si1-xGex multiple quantum wells on Si(110) and Si(111)
Published in Journal of crystal growth (01-12-1995)Get full text
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15
Diffusion of ion implanted boron in preamorphized silicon
Published in Applied physics letters (06-05-1996)“…Transient enhanced diffusion of boron in preamorphized and subsequently regrown Si was studied by secondary ion mass spectrometry (SIMS) and transmission…”
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16
Diode structures from amorphous low-temperature GaAs
Published in Journal of electronic materials (01-12-1993)“…Effect of annealing on electrical properties of GaAs diode structure that incorporates a nominally undoped LT layer on top of conventionally grown p-type GaAs…”
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17
Characterization of sample heterogeneity in secondary ion mass spectrometry by the use of a sampling constant model
Published in Analytical chemistry (Washington) (01-12-1991)“…An in-depth study was undertaken to evaluate the applicability of the sampling constant concept for the characterization of heterogeneity of elemental…”
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18
99.996 % 12C films isotopically enriched and deposited in situ
Published in Applied physics letters (24-06-2013)“…Ionizing natural abundance carbon dioxide gas, we extract and mass select the ions, depositing thin films isotopically enriched to 99.9961(4) % 12C as measured…”
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19
Unintentional indium incorporation in GaAs grown by molecular beam epitaxy
Published in Applied physics letters (26-11-1990)“…We have quantified unintentional indium incorporation in GaAs grown by molecular beam epitaxy in a variety of commercial systems. We find that the…”
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20
Doping of gallium nitride using disilane
Published in Journal of electronic materials (01-11-1995)Get full text
Conference Proceeding Journal Article