Search Results - "Shu, D.Y."
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Evolution of microstructure and texture in copper during repetitive extrusion-upsetting and subsequent annealing
Published in Journal of materials science & technology (01-07-2017)“…The evolution of the microstructure and texture in copper has been studied during repetitive extrusionupsetting(REU) to a total von Mises strain of 4.7 and…”
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Journal Article -
2
Correlation of growth of pentacene films at various gas ambience conditions to organic field-effect transistor characteristics
Published in Organic electronics (01-12-2006)“…Pentacene based thin-film transistors (TFTs) have been fabricated using pentacene films grown under various ambiences, such as N 2, H 2, Ar, He, and high…”
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Journal Article -
3
Reactive ion etching of Si 1− xGe x alloy with hydrogen bromide
Published in Applied surface science (2004)“…Epitaxial Si 1− x Ge x x≦0.25 films were reactive ion etched in hydrogen bromide (HBr) plasma. The etch characteristics are similar to single-crystal Si. For…”
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Journal Article -
4
Investigation of silicon-on-insulator (SOI) substrate preparation using the smart-cutTM process
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-08-2005)“…A promising technology called smart-cutTM process based on the hydrogen ion implantation and wafer bonding was proposed to prepare the SOI wafers. In this…”
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Journal Article -
5
Reactive ion etching of Si1-xGex alloy with hydrogen bromide
Published in Applied surface science (15-03-2004)Get full text
Conference Proceeding Journal Article -
6
Optimization and fabrication of planar edge termination techniques for a high breakdown voltage and low leakage current p-i-n diode
Published in Nineteenth Annual IEEE Applied Power Electronics Conference and Exposition, 2004. APEC '04 (2004)“…The planar edge termination techniques of junction termination extension (JTE) and offset field plates and field-limiting rings (OFP-FLR) were investigated and…”
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Conference Proceeding -
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In-line inspection on thickness of sputtered HfO/sub 2/ and Hf metal ultra-thin films by spectroscopic ellipsometry
Published in 2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) (2004)“…HfO 2 -based dielectrics are most promising high k materials to substitute SiO 2 for the MOS gate dielectric. To guarantee the deposition process under well…”
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Conference Proceeding