Search Results - "Shkel, A.M."

High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG by Senkal, D., Ahamed, M.J., Trusov, A.A., Shkel, A.M.

“…We report, for the first time, a MEMS fabrication process for building atomically smooth, symmetric 3-D wineglass and spherical shell structures, using low…”
Get full text

Glass Blowing on a Wafer Level by Eklund, E.J., Shkel, A.M.

“…A fabrication process for the simultaneous shaping of arrays of glass shells on a wafer level is introduced in this paper. The process is based on etching…”
Get full text

Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications by Acar, C., Schofield, A.R., Trusov, A.A., Costlow, L.E., Shkel, A.M.

“…Automotive applications are known to impose quite harsh environmental conditions such as vibration, shock, temperature, and thermal cycling on inertial…”
Get full text

An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes by Acar, C., Shkel, A.M.

“…The limitations of the photolithography-based micromachining technologies defines the upper-bound on the performance and robustness of micromachined…”
Get full text

Snap-Action Bistable Micromechanisms Actuated by Nonlinear Resonance by Casals-Terre, J., Fargas-Marques, A., Shkel, A.M.

“…This paper presents analysis, design, realization, and experimental demonstration of a bistable switch actuated dynamically utilizing mechanical resonance…”
Get full text

Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator by Acar, C., Shkel, A.M.

“…Commercialization of reliable vibratory micromachined gyroscopes for high-volume applications has proven to be extremely challenging, primarily due to the high…”
Get full text

Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators by Fargas-Marques, A., Casals-Terre, J., Shkel, A.M.

“…Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. In the static case, the…”
Get full text

Active structural error suppression in MEMS vibratory rate integrating gyroscopes by Painter, C.C., Shkel, A.M.

“…Due to restrictive tolerancing in microfabrication, structural imperfections that reduce performance of fabricated micro devices are typical. In…”
Get full text

A Novel Capacitive Detection Scheme With Inherent Self-Calibration by Trusov, A.A., Shkel, A.M.

“…This paper reports a novel capacitive detection method, called the sideband-ratio (SBR) detection, which is robust to variations of such critical parameters as…”
Get full text

Effects of Operational Frequency Scaling in Multi-Degree of Freedom MEMS Gyroscopes by Schofield, A.R., Trusov, A.A., Shkel, A.M.

“…This paper analyzes the design tradeoffs associated with increasing the operational frequency of single-axis microelectromechanical systems (MEMS) gyroscopes…”
Get full text

Nonresonant micromachined gyroscopes with structural mode-decoupling by Acar, C., Shkel, A.M.

“…This paper reports a novel four-degrees-of-freedom (DOF) nonresonant micromachined gyroscope design concept that addresses two major MEMS gyroscope design…”
Get full text

Type I and Type II Micromachined Vibratory Gyroscopes by Shkel, A.M.

Get full text

Electrostatic and mechanical characterization of 3-D micro-wineglass resonators by Senkal, D., Ahamed, M.J., Trusov, A.A., Shkel, A.M.

“…•Two interchangeable modes of excitation are demonstrated for testing of 3D micro-wineglass resonators.•Mechanical testing consists of pinging using a piezo…”
Get full text

Design and Demonstration of a Bulk Micromachined Fabry-PÉrot \mug-Resolution Accelerometer by Perez, M.A., Shkel, A.M.

“…A high resolution, passive, bulk-micromachined accelerometer based on the transmission-type intrinsic Fabry-Perot interferometer has been designed, fabricated…”
Get full text

Guest editorial by Sarro, P.M., Shkel, A.M.

Get full text

Guest editorial by Sarro, P.M., Shkel, A.M.

Get full text

Guest editorial by Sarro, P.M, Shkel, A.M

Get full text

Design and Demonstration of a Bulk Micromachined Fabry-PÉrot [mu]g-Resolution Accelerometer by Perez, M A, Shkel, A M

“…A high resolution, passive, bulk-micromachined accelerometer based on the transmission-type intrinsic Fabry-Perot interferometer has been designed, fabricated…”
Get full text

Multi-Degree of Freedom Tuning Fork Gyroscope Demonstrating Shock Rejection by Schofield, A.R., Trusov, A.A., Shkel, A.M.

“…This paper presents a z-axis MEMS tuning fork rate gyroscope with multi-degree of freedom (DOF) sense modes designed to provide structural robustness to…”
Get full text

Editorial by Shkel, A.M., Liu, C., Tang, W.C.

Get full text