Search Results - "Shiuan-Jeng Lin"

The removal of airborne molecular contamination in cleanroom using PTFE and chemical filters by Ching-Fa Yeh, Chih-Wen Hsiao, Shiuan-Jeng Lin, Chih-Min Hsieh, Kusumi, T., Aomi, H., Kaneko, H., Bau-Tong Dai, Ming-Shih Tsai

“…Cleanroom contamination and its impact on the performance of devices are beginning to be investigated due to the increasing sensitivity of the semiconductor…”
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Impact of Air Filter Material on Metal Oxide Semiconductor (MOS) Device Characteristics in HF Vapor Environment by Hsiao, Chih-Wen, Lou, Jen-Chung, Yeh, Ching-Fa, Hsieh, Chih-Ming, Lin, Shiuan-Jeng, Kusumi, Toshio

“…Airborne molecular contamination (AMC) is becoming increasingly important as devices are scaled down to the nanometer generation. Optimum ultra low penetration…”
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Impact of airborne molecular contamination to nano-device performance by Ching-Fa Yeh, Chih-Wen Hsiao, Shiuan-Jeng Lin, Zhi-Min Xie, Toshio Kusumi

“…In this paper, we detected most airborne molecular contamination (AMC) in our present cleanroom and in our specially equipped clean bench through air sampling…”
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