Regularities of application of glow discharge spectrometry for quantitative layer-by-layer analysis of thin coatings

Regularities of application of glow discharge spectrometry for quantitative layer-by-layer analysis of thin coatings

Regularities of application of glow discharge spectrometry are considered for quantitative layer-by-layer analysis of thin coatings on steels. The known methods of surface analysis used in industry and in research are compared. The main fields of application of glow discharge spectrometry are consid...

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Bibliographic Details
Published in:Inorganic materials Vol. 47; no. 14; pp. 1584 - 1591
Main Authors: Sprygin, G. S., Grigorovich, K. V., Shitov, B. A., Vlasova, V. I.
Format: Journal Article
Language:English
Published: Dordrecht SP MAIK Nauka/Interperiodica 01-12-2011
Subjects:
Chemistry
Chemistry and Materials Science
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Materials Science
layer-by-layer analysis
coating
plasma parameter
spectrometer
calibration
support
glow discharge
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Summary:Regularities of application of glow discharge spectrometry are considered for quantitative layer-by-layer analysis of thin coatings on steels. The known methods of surface analysis used in industry and in research are compared. The main fields of application of glow discharge spectrometry are considered. The key causes for distortion of the analytical signal shape in quantitative layer-by-layer analysis using glow discharge spectrometers are discussed: the effect of the etching pit shape, analytical noise, and regularities of surface geometry of the studied samples. The main limitations of the methods in analysis of thin layers and coatings are shown. Calibration samples are developed for control of the thickness of thin chromium electrochemical coatings on steels. Metrological characteristics are estimated in measurement of the coating thickness. A method of quantitative layer-by-layer analysis on SA-2000 and GDS 850A glow discharge spectrometers (LECO) is proposed.
ISSN:0020-1685
1608-3172
DOI:10.1134/S0020168511140226