Boosting Non-volatile Memory Performance with Exhalative Annealing: A Novel Approach to Low-Temperature Crystallization of Hafnia Based Ferroelectric

Boosting Non-volatile Memory Performance with Exhalative Annealing: A Novel Approach to Low-Temperature Crystallization of Hafnia Based Ferroelectric

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Bibliographic Details
Published in:Materials today. Nano p. 100546
Main Authors: Lee, Yunseong, Kim, Un Jeong, Kim, Kihong, Yun, Dong-Jin, Choe, Duk-hyun, Yoo, Sijung, Lee, Hyun Jae, Nam, Seung-Geol, Jo, Sanghyun, Park, Yoonsang, Kim, Donghoon, Kim, Dongmin, Kim, Haeryong, Shin, Keunwook, Nahm, Sahn, Heo, Jinseong
Format: Journal Article
Language:English
Published: 01-11-2024
Online Access:Get full text
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ISSN:2588-8420
2588-8420
DOI:10.1016/j.mtnano.2024.100546