Search Results - "Shibata, Emi"

Etching Enhancement Followed by Nitridation on Low-$k$ SiOCH Film in Ar/C5F10O Plasma by Miyawaki, Yudai, Shibata, Emi, Kondo, Yusuke, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Okamoto, Hidekazu, Sekine, Makoto, Hori, Masaru

“…The etching rates of low-dielectric-constant (low-$k$), porous SiOCH (p-SiOCH) films were increased by nitrogen-added Ar/C 5 F 10 O plasma etching in…”
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Habitat management of little terns in Japan’s highly developed landscape by Fujita, Go, Totsu, Kumiko, Shibata, Emi, Matsuoka, Yoshimi, Morita, Hiroyuki, Kitamura, Wataru, Kuramoto, Noboru, Masuda, Naoya, Higuchi, Hiroyoshi

“…The little tern ( Sterna albifrons) is a species of shorebird that nests in colonies on sandy beaches and riverbanks with little vegetation cover. In Japan,…”
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Etching Enhancement Followed by Nitridation on Low-k SiOCH Film in Ar/C 5 F 10 O Plasma by Miyawaki, Yudai, Shibata, Emi, Kondo, Yusuke, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Okamoto, Hidekazu, Sekine, Makoto, Hori, Masaru

“…The etching rates of low-dielectric-constant (low- k ), porous SiOCH (p-SiOCH) films were increased by nitrogen-added Ar/C 5 F 10 O plasma etching in…”
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Etching Enhancement Followed by Nitridation on Low-k SiOCH Film in Ar/C sub(5)F sub(10)O Plasma by Miyawaki, Yudai, Shibata, Emi, Kondo, Yusuke, Takeda, Keigo, Kondo, Hiroki, Ishikawa, Kenji, Okamoto, Hidekazu, Sekine, Makoto, Hori, Masaru

“…The etching rates of low-dielectric-constant (low-k), porous SiOCH (p-SiOCH) films were increased by nitrogen-added Ar/C sub(5)F sub(10)O plasma etching in…”
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Habitat management of little terns in Japan's highly developed landscape: The Conservation and Management of Biodiversity in Japan by GO FUJITA, TOTSU, Kumiko, SHIBATA, Emi, MATSUOKA, Yoshimi, MORITA, Hiroyuki, KITAMURA, Wataru, KURAMOTO, Noboru, MASUDA, Naoya, HIGUCHI, Hiroyoshi

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