Etching of micro-channels in fused quartz for novel device applications

Etching of micro-channels in fused quartz for novel device applications

Saved in:
Bibliographic Details
Published in:Materials today : proceedings
Main Authors: Shetty, Shubhava, Kumar Mishra, Dileep, Dixit, Pradeep, Shetty, Shrushti S, Jayarama, A., shah, Amit P., gokhale, Mahesh R., Prabhu, Shriganesh, Duttagupta, S.P, Pinto, Richard
Format: Journal Article
Language:English
Published: 01-08-2023
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
ISSN:2214-7853
2214-7853
DOI:10.1016/j.matpr.2023.07.253