Search Results - "Shen, Xumin William"
-
1
Novel E-beam Techniques for Inspection and Monitoring
Published in 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (06-03-2022)“…In this paper, we report an advanced e-beam defect inspection tool (eProbe®250) and the Design-for- Inspection™ (DFI) system that has been built and deployed…”
Get full text
Conference Proceeding -
2
DFI Filler Cells - New Embedded Type of Test Structures for Non-Contact Detection of Electrical Defects on Product Wafers
Published in 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) (21-03-2022)“…A new type of test structures has been developed for process monitoring and defect detection on product wafers. The structures are part of PDF Solutions'…”
Get full text
Conference Proceeding