Search Results - "Shell, Melissa"

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    Exposing extreme ultraviolet lithography at Intel by Roberts, Jeanette, Bacuita, Terence, Bristol, Robert L., Cao, Heidi, Chandhok, Manish, Lee, Sang H., Leeson, Michael, Liang, Ted, Panning, Eric, Rice, Bryan J., Shah, Uday, Shell, Melissa, Yueh, Wang, Zhang, Guojing

    Published in Microelectronic engineering (01-04-2006)
    “…In this paper we present the latest results on developing and integrating extreme ultraviolet lithography (EUVL) at Intel. The world’s first commercial EUV…”
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    Journal Article Conference Proceeding
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    The bond shear test: an application for the reduction of common causes of gold ball bond process variation by Shell-De Guzman, M., Mahaney, M.

    “…Examples indicate that the bond shear test can be used effectively to reduce common cause variability in the wire bond process, allowing in-process monitors to…”
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    Conference Proceeding
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    Mechanical properties and adhesion measurements of films used in advanced packages by Shell-De Guzman, M., Hack, M., Neubauer, G.

    “…"Depth-sensing" ultra micro-indentation is a novel method for measuring the hardness, elastic modulus, and adhesion of films as thin as 0.4 micrometers. Three…”
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    Conference Proceeding