Search Results - "Shekhawat, Aniruddh"
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1
Effect of in situ hydrogen plasma on the ferroelectricity of hafnium zirconium oxide films
Published in Applied physics letters (21-01-2020)“…The emerging field of ferroelectric hafnium zirconium oxide has garnered increased attention recently for its wide array of applications from nonvolatile…”
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Journal Article -
2
Tiered deposition of sub-5 nm ferroelectric Hf1-xZrxO2 films on metal and semiconductor substrates
Published in Applied physics letters (07-05-2018)“…Using a tiered deposition approach, Hf1-xZrxO2 (HZO) films with varying atomic layer deposition (ALD) cycles from 36 to 52 cycles were grown on Ge, Ir, and TiN…”
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Journal Article -
3
Gate tunneling current and quantum capacitance in metal-oxide-semiconductor devices with graphene gate electrodes
Published in Applied physics letters (28-11-2016)“…Metal-oxide-semiconductor (MOS) devices with graphene as the metal gate electrode, silicon dioxide with thicknesses ranging from 5 to 20 nm as the dielectric,…”
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Journal Article -
4
Effect of furnace annealing on the ferroelectricity of Hf0.5 Zr0.5O2 thin films
Published in Thin solid films (01-05-2019)“…The effect of furnace annealing on the ferroelectricity and crystal phase of Hf0.5ZrO2 (HZO) ultrathin films is studied as a function of film thickness. HZO…”
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Journal Article -
5
Ferroelectric Properties of HfO2-Based Thin Films and Their Application for Low Power and Scalable Ferroelectric Tunnel Junctions
Published 01-01-2021“…Ferroelectric random-access memories (FRAM) based on conventional perovskite materials are non-volatile with fast read/write (ns access times) operations but…”
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Dissertation