Development and extraction of high-frequency SPICE models for metal-insulator-metal capacitors

In the framework of a lumped-element SPICE model, we extract RF parameters for a MIM capacitor, such as series resistance and inductance. The extraction method is validated through a "dummy" MIM capacitor where the dielectric layer is omitted during the fabrication process. A distributed m...

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Bibliographic Details
Published in:	Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516) pp. 231 - 234
Main Authors:	Cai, W.Z., Shastri, S.C., Azam, M., Hoggatt, C., Loechelt, G.H., Grivna, G.M., Wen, Y., Dow, S.
Format:	Conference Proceeding
Language:	English
Published:	Piscataway NJ IEEE 2004
Subjects:	Applied sciences Data mining Dielectric measurements Electrical resistance measurement Electronics Exact sciences and technology Fabrication Inductance MIM capacitors Parasitic capacitance Radio frequency SPICE Temperature Testing, measurement, noise and reliability MIM devices Inductance Series connection Manufacturing process Lumped parameter circuit Testing equipment Feature extraction SPICE Power capacitor High frequency
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Summary:	In the framework of a lumped-element SPICE model, we extract RF parameters for a MIM capacitor, such as series resistance and inductance. The extraction method is validated through a "dummy" MIM capacitor where the dielectric layer is omitted during the fabrication process. A distributed model provides a good fit to measured data; fits to Q(f) and C(f) are replicated using a lumped model as well.
ISBN:	9780780382626 0780382625
DOI:	10.1109/ICMTS.2004.1309485