Search Results - "Sharda, T."

Fabrication of a film bulk acoustic wave resonator from nano-crystalline diamond by Shikata, S., Fujii, S., Sharda, T.

“…A proposed new type of diamond-based frequency device has been fabricated for the first time through the use of nano-crystalline diamond as the thin film…”
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Structural and optical properties of diamond and nano-diamond films grown by microwave plasma chemical vapor deposition by Sharda, T., Rahaman, M.M., Nukaya, Y., Soga, T., Jimbo, T., Umeno, M.

“…We compare structural and optical properties of microcrystalline and nanocrystalline diamond (MCD and NCD, respectively) films grown on mirror polished Si(100)…”
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Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition by Sharda, T., Soga, T., Jimbo, T., Umeno, M.

“…Nanocrystalline diamond (NCD) films were grown using biased enhanced growth (BEG) in microwave plasma chemical vapor deposition on mirror polished silicon…”
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Structural and optical characterization of thick and thin polycrystalline diamond films deposited by microwave plasma activated CVD by PRADHAN, S K, SATPATI, B, BAG, B P, SHARDA, T

“…Preliminary results of growth of thin diamond film in a recently installed 3 kW capacity microwave plasma activated CVD (MW-PACVD) system are being reported…”
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Biased enhanced growth of nanocrystalline diamond films by microwave plasma chemical vapor deposition by Sharda, T, Soga, T, Jimbo, T, Umeno, M

“…Smooth nanocrystalline diamond thin films with rms surface roughness of ∼17 nm were grown on silicon substrates at 600°C using biased enhanced growth (BEG) in…”
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Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition: A different regime of growth by Sharda, T., Umeno, M., Soga, T., Jimbo, T.

“…Hard and smooth nanocrystalline diamond films are grown on mirror polished silicon substrates by biased enhanced growth (BEG) in microwave plasma chemical…”
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High compressive stress in nanocrystalline diamond films grown by microwave plasma chemical vapor deposition by Sharda, T., Soga, T., Jimbo, T., Umeno, M.

“…Hard and smooth nanocrystalline diamond (NCD) thin films were deposited on mirror polished silicon substrates by biased enhanced growth in a microwave plasma…”
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Highly stressed carbon film coatings on silicon: Potential applications by Sharda, T., Soga, T., Jimbo, T., Umeno, M.

“…Highly stressed and strongly adhered nanocrystalline diamond films are grown on Si substrates by providing controlled and continuous bias current density (BCD)…”
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Precursors for CVD growth of nanocrystalline diamond by Soga, T., Sharda, T., Jimbo, T.

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Effect of substrate holder boundaries on reproducibility of bias-enhanced diamond nucleation by Sharda, T, Soga, T, Jimbo, T, Umeno, M

“…In this paper, we have reported how the substrate holder affects the generation of diamond nucleation by biasing in microwave plasma chemical vapor deposition…”
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Thermal stability of nanocrystalline diamond films grown by biased enhanced microwave plasma chemical vapor deposition by Sharda, T, Soga, T, Jimbo, T, Umeno, M

“…The thermal stability of nanocrystalline diamond (NCD) films grown on mirror-polished silicon substrates by biased enhanced microwave plasma chemical vapor…”
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Hydrogen in chemical vapour deposited diamond films by Sharda, T, Misra, DS, Avasthi, DK

“…Thin films of diamond were deposited at 20, 40 and 70 Torr by MPCVD and at 40, 100 and 140 Torr by HFCVD while keeping the substrate temperature constant. The…”
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Diamond deposition on Ni/Ni-diamond coated stainless steel substrate by Sikder, A. K., Sharda, T., Misra, D. S., Chandrasekaram, D., Veluchamy, P., Minoura, H., Selvam, P.

“…Electrodeposited Ni and Ni-diamond composite layers were used as diffusion barriers for Fe to facilitate the diamond growth on stainless steel substrates…”
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Chemical vapour deposition of diamond on stainless steel: the effect of Ni-diamond composite coated buffer layer by Sikder, A.K., Sharda, T., Misra, D.S., Chandrasekaram, D., Selvam, P.

“…Diamond films were grown on nickel and nickel-diamond composite coated stainless steel substrates using microwave plasma chemical vapour deposition (MPCVD)…”
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High resolution Auger electron spectroscopy studies on (100) and (111) facets of chemical vapor deposited diamond by Sharda, T., Misra, D. S., Seibt, E. W., Selvam, P.

“…Diamond thin films were grown by microwave plasma and hot filament chemical vapor deposition (MPCVD and HFCVD, respectively) techniques. Films were…”
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Studies of defects and impurities in diamond thin films by Sharda, T., Sikder, A.K., Misra, D.S., Collins, A.T., Bhargava, S., Bist, H.D., Veluchamy, P., Minoura, H., Kabiraj, D., Awasthi, D.K., Selvam, P.

“…Diamond thin films were grown on silicon substrates using microwave plasma chemical vapour deposition at various microwave power densities (MPD). Three sets of…”
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DC electrical conductivity of chemical vapour deposited diamond sheets : a correlation with hydrogen content and paramagnetic defects by SIKDER, A. K, JACOB, A. P, SHARDA, T, MISRA, D. S, PANDEY, M, KABIRAJ, D, AVASTHI, D. K

“…Diamond sheets were grown on p-type Si(100) substrates varying the deposition pressure from 20 to 140 Torr at 1163 K by a hot filament chemical vapour…”
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A different regime of nanostructured diamond film growth by Sharda, Tarun, Soga, Tetsuo

“…A different regime of diamond growth was found out in microwave plasma chemical vapor deposition by applying a different combination of growth conditions…”
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Dissociation kinetics of molecular hydrogen in a microwave plasma and its influence on the hydrogen content in diamond films by Sharda, Tarun, Misra, D.S, Avasthi, D.K, Mehta, G.K

“…Double probe measurements were performed in a microwave plasma at various hydrogen pressures. Electron temperature increases with the growth pressure. Electron…”
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Anomalous Auger electron spectroscopy results of chemical vapor deposited diamond (111) and (100) surfaces by Sharda, Tarun, Misra, D.S, Seibt, E.W, Selvam, P

“…High resolution Auger electron spectroscopy was performed on (111) and (100) facets as well as on a microvoid of polycrystalline diamond films. Auger fine…”
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