Search Results - "Shamamian, V."
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Guided resonances in asymmetrical GaN photonic crystal slabs observed in the visible spectrum
Published in Optics express (22-08-2005)“…We demonstrate that guided resonant modes can be readily observed in asymmetrical photonic crystal slabs on high-index substrates. In spite of the high…”
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2
Dense Medium Plasma Environments: A New Approach for the Disinfection of Water
Published in Environmental science & technology (15-09-2001)“…The levels to which microbial colony forming units are permitted in various waters fit for human contact are carefully regulated. Conventional chemical and…”
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3
Characterization of the CH4/H2/Ar high density plasma etching process for HgCdTe
Published in Journal of electronic materials (01-04-1999)“…High density plasma etching of mercury cadmium telluride using CH4/H2/Ar plasma chemistries is investigated. Mass spectrometry is used to identify and monitor…”
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4
Characterization of the CH4/H2/Ar high density plasma etching process for ZnSe
Published in Journal of electronic materials (01-05-2001)Get full text
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5
Guided resonances in asymmetrical GaN photonic crystal slabs observed in the visible spectrum
Published in Optics express (2005)Get full text
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6
Treatment of Methyl tert-Butyl Ether Contaminated Water Using a Dense Medium Plasma Reactor: A Mechanistic and Kinetic Investigation
Published in Environmental science & technology (15-10-2003)“…Plasma treatment of contaminated water appears to be a promising alternative for the oxidation of aqueous organic pollutants. This study examines the kinetic…”
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7
Gallium arsenide surface chemistry and surface damage in a chlorine high density plasma etch process
Published in Journal of electronic materials (01-11-1997)Get full text
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8
Mass spectrometry sampling method for characterizing high-density plasma etching mechanisms
Published in Applied physics letters (26-05-2003)“…Mass spectrometry sampling using a “through-the-platen” technique is described with respect to its utility in characterizing high-density plasma etching…”
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9
Characterization of Cl 2 /Ar high density plasmas for semiconductor etching
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-1999)“…Chlorine-based high density plasmas, commonly used in the etching of elemental and compound semiconductors, are characterized using mass spectrometry, optical…”
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10
Combustion chemistry in premixed C2F4-O2 flames
Published in Combustion and flame (01-03-1995)“…The flame speed and combustion product distribution in a premixed C2F4-O2 flame at atmospheric pressure have been measured and are compared with computational…”
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11
Surface chemistry and damage in the high density plasma etching of gallium arsenide
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-05-1998)“…Anisotropic pattern transfer with low damage in compound semiconductor dry etching requires an in depth understanding of the chemical processes that occur at…”
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Two-dimensional model of a large area, inductively coupled, rectangular plasma source for chemical vapor deposition
Published in IEEE transactions on plasma science (01-10-1999)“…A novel design for an inductively coupled, rectangular plasma source is described. The design encompasses several key issues of large area thin film growth by…”
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13
Decomposition of trimethylgallium on the gallium-rich GaAs (100) surface : implications for atomic layer epitaxy
Published in Applied physics letters (16-07-1990)“…The decomposition of trimethylgallium (TMGa) on the gallium-rich (4×6) and (1×6) GaAs (100) surface was studied with temperature programmed desorption, Auger…”
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14
Using Ni masks in inductively coupled plasma etching of high density hole patterns in GaN
Published in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (01-07-2005)“…High density patterns of holes in metalorganic chemical vapor deposition grown GaN films on sapphire have been fabricated by inductively coupled plasma etching…”
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15
Kinetic effects in the chemistry of diamond CVD source gases and implications for diamond growth
Published in Diamond and related materials (01-11-1996)“…Perfectly stirred reactor calculations have been carried out on six different gas mixtures containing ethanol, water, methane, acetylene, oxygen and hydrogen…”
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Dense Medium Plasma-Plasma-Enhanced Decontamination of Water of Aromatic Compounds
Published in Journal of environmental engineering (New York, N.Y.) (01-01-2004)“…Artificially contaminated water with aromatic compounds, including benzene, ethylbenzene, and xylenes, was exposed to dense medium plasma (DMP) environments in…”
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17
Ion Energy Effects on Surface Chemistry and Damage in a High Density Plasma Etch Process for Gallium Arsenide
Published in Japanese Journal of Applied Physics (01-05-1998)“…Etch product chlorides from a gallium arsenide substrate subjected to a high density Cl 2 /Ar plasma etching process have been sampled in situ to determine…”
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18
An analysis of gas phase ethanol-water chemistry for diamond CVD
Published in Diamond and related materials (01-10-1995)“…Chemical kinetics calculations were carried out on ethanol (EtOH)-water mixtures at a range of temperatures, pressures and EtOH-to-H 2O ratios. The results…”
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19
Speed ratios greater than 1000 and temperatures less than 1 mK in a pulsed he beam
Published in Physical review letters (22-02-1988)Get full text
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20
Characterization of Cl2/Ar high density plasmas for semiconductor etching
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-1999)“…Chlorine-based high density plasmas, commonly used in the etching of elemental and compound semiconductors, are characterized using mass spectrometry, optical…”
Get full text
Journal Article