Search Results - "Seungdo An"
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1
A Si-Micromachined 162-Stage Two-Part Knudsen Pump for On-Chip Vacuum
Published in Journal of microelectromechanical systems (01-04-2014)“…This paper investigates a two-part architecture for a Knudsen vacuum pump with no moving parts. This type of pump exploits the thermal transpiration that…”
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2
A Monolithic High-Flow Knudsen Pump Using Vertical Al2O3 Channels in SOI
Published in Journal of microelectromechanical systems (01-10-2015)“…This paper describes the analysis, design, and microfabrication of a Knudsen pump for high flow generation. The Knudsen pump generates gas streams from the…”
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3
Line-defect calibration for line-scanning projection display
Published in Optics express (14-09-2009)“…A method of line-defect calibration for line-scanning projection display is developed to accomplish acceptable display uniformity. The line scanning display…”
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4
A monolithic Knudsen pump WITH 20 sccm flow rate using through-wafer ONO channels
Published in 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) (01-01-2014)“…This paper describes a lithographically microfabricated Knudsen pump for high gas flow. Knudsen pumps operate by thermal transpiration and require no moving…”
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Conference Proceeding -
5
A Dynamic Calibration Method for Pirani Gauges Embedded in Fluidic Networks
Published in Journal of microelectromechanical systems (01-06-2014)“…This paper describes in situ dynamic calibration of microfabricated Pirani gauges, which are commonly used to measure vacuum levels in microsystems that may…”
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6
Vacuum sealing using atomic layer deposition of Al2O3 at 250 °C
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01-01-2014)“…This paper describes the use of low-temperature atomic layer deposition (ALD) of Al2O3, for vacuum seals in wafer-level vacuum packaging and other…”
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7
Speckle suppression in laser display using several partially coherent beams
Published in Optics express (05-01-2009)“…An optical scheme for speckle suppression using two or three partially coherent beams in a projection system is proposed. Diffractive optical elements (DOE)…”
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8
Two-Input Axis Angular Rate Sensor
Published in Japanese Journal of Applied Physics (01-12-1998)“…A vibrating angular rate sensor is developed by the polysilicon surface micromachining process. The 7.0 µm-thick polysilicon layer is deposited by low-pressure…”
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9
Creep compensation method in a thin film PZT structure for a spatial optical modulator
Published in Sensors and actuators. A. Physical. (01-06-2011)“…The dependence of ribbons time drift of a spatial optical modulator on the driving voltage is analyzed. It was assumed that mechanical stress, which follows…”
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10
A study of image contrast restriction in displays using diffractive spatial light modulators
Published in Displays (2010)“…The peculiarities of 1D projection displays using spatial light modulators (SLM 1 Abbreviations used: SLM, spatial light modulator; GLV, grating light valve;…”
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11
SOM-based projection module for mobile displays
Published in Journal of the Society for Information Display (01-06-2010)“…— The development of a compact, efficient VGA projection module to be embedded in mobile devices is reported. The design incorporates laser/laser diode (LD)…”
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12
Two-Input.axis Angular Rate Sensor
Published in Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) (1998)“…The dual-axis angular rate sensor is fabricated by surface micromachining process. The 7.0 mum thick polysilicon layer deposited by LPCVD is used for…”
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Conference Proceeding -
13
Spatial analysis of $PM_{10}$ and cardiovascular mortality in the Seoul metropolitan area
Published in Environmental health and toxicology (2014)“…Objectives Numerous studies have revealed the adverse health effects of acute and chronic exposure to particulate matter less than $10{\mu}m$ in aerodynamic…”
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14
음료용 폐자동판매기에서의 HFC-134a 사용 및 폐기단계 탈루배출계수 결정에 대한 연구
Published in Daehan hwan'gyeong gonghag hoeji (2013)“…Little information is available for emission pathway even if HFC-134a that is known as one of the major greenhouse gases has been broadly used in Korea. This…”
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