Search Results - "Sethuraman, Anantha R."

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  1. 1

    Review of planarization and reliability aspects of future interconnect materials by Sethuraman, Anantha R., Wang, Jiun-Fang, Cook, Lee M.

    Published in Journal of electronic materials (01-10-1996)
    “…Device linewidths are shrinking resulting in more stringent requirements on choice of materials, processes and designs. Current generation of memory and…”
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    Journal Article
  2. 2

    Structural and surface characterization of ultrafine iron carbide particles generated by laser pyrolysis. I. High temperature He treatment by Sethuraman, Anantha R., Stencel, John M., Rubel, Aurora M., Cavin, Burl, Hubbard, Camden R.

    “…Three samples of passivated ultrafine iron carbide particles, synthesized by laser induced pyrolysis of gaseous precursors, were examined by x‐ray diffraction,…”
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    Journal Article
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