Search Results - "Senz, ST"
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Fundamental issues in wafer bonding
Published in Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films (01-07-1999)“…Semiconductor wafer bonding has increasingly become a technology of choice for materials integration in microelectronics, optoelectronics, and…”
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Conference Proceeding Journal Article -
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Formation of an amorphous product phase during the solid state reaction between a vitreous SiO2 thin film and a (001) BaTiO3 substrate
Published in Journal of the European Ceramic Society (01-12-2000)“…The solid state chemical reaction was investigated as a model system for processes occurring during the sintering of BaTiO3 ceramics with the sintering…”
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“Compliant” twist-bonded GaAs substrates: The potential role of pinholes
Published in Applied physics letters (18-01-1999)“…By twist wafer bonding, thin (100) GaAs layers were transferred onto (100) GaAs handling wafers in order to fabricate structures like those suggested in the…”
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Crystallographic orientation and morphology of epitaxial In2O3 thin films grown on MgO(001) single crystal substrates
Published in Thin solid films (15-07-1997)Get full text
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Relaxation of an epitaxial InGaAs film on a thin twist-bonded (100) GaAs substrate
Published in Applied physics letters (07-02-2000)“…A 30 nm (100) GaAs layer was transferred by twist wafer bonding to a (100) GaAs handling wafer. A similar structure was proposed in the literature as a…”
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Interface defects in integrated hybrid semiconductors by wafer bonding
Published in Physica. B, Condensed matter (01-12-2001)“…The integration of materials by wafer bonding offers novel device fabrication for applications in micromechanics, microelectronics, and optoelectronics. Two…”
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Journal Article -
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Formation of an amorphous product phase during the solid state reaction between a vitreous SiO 2 thin film and a (001) BaTiO 3 substrate
Published in Journal of the European Ceramic Society (2000)“…The solid state chemical reaction of a thin SiO 2 film with a single-crystal (001) BaTiO 3 substrate has been investigated as a model system for processes…”
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Journal Article -
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Crystallographic orientation and morphology of epitaxial In 2O 3 thin films grown on MgO(001) single crystal substrates
Published in Thin solid films (1997)“…Thin epitaxial In 2O 3 films were grown on MgO(001) single crystal substrates by electron beam evaporation in a high-vacuum chamber. During the evaporation,…”
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Characterisation of interfacial properties in sputtered Co/Cu multilayers: X-ray reflectometry compared with TEM and AFM
Published in Journal of magnetism and magnetic materials (01-06-1999)“…Combining localised and global structural information we suggest that differences in the magnetoresistive effect in the first maximum of antiferromagnetic…”
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Journal Article Conference Proceeding -
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Interface defects in integrated hybrid semiconductors by wafer bonding
Published in Physica. B, Condensed matter (2001)Get full text
Conference Proceeding -
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Wafer bonding of gallium arsenide on sapphire
Published in Applied physics. A, Materials science & processing (01-06-1997)Get full text
Journal Article -
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Unexpected growth of GMR multilayers: 〈111〉 in-plane texture and grain bundling in 5 nm Fe/(Co/Cu)24
Published in Journal of magnetism and magnetic materials (02-04-1996)“…Sputtered Co/Cu multilayers were investigated by X-ray diffractometry and TEM. We confirm a 〈111〉 texture perpendicular to the surface for layers grown with…”
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Journal Article -
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Direct wafer bonding and layer transfer for ferroelectric thin film integration
Published in Integrated ferroelectrics (01-11-1999)“…A novel fabrication process of ferroelectric-semiconductor heterostructures based on direct wafer bonding (DWB) and layer transfer is proposed…”
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Journal Article -
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Unexpected growth of GMR multilayers: < 111 > in-plane texture and grain bundling in 5 nm Fe/(Co/Cu) sub(24)
Published in Journal of magnetism and magnetic materials (01-01-1996)“…Sputtered Co/Cu multilayers were investigated by X-ray diffractometry and TEM. We confirm a < 111 > texture perpendicular to the surface for layers grown with…”
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Phase identification of micro and macro bubbles at the interface of directly bonded GaAs on sapphire
Published in Journal of materials science (01-04-1998)“…Direct wafer bonding (DWB) of 3″ GaAs and R-cut sapphire was performed in a microcleanroom using ultra pure water as cleaning agent. The initial bonding is…”
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Epitaxial Bi-layered perovskite ferroelectric thin film heterostructures by large area pulsed laser deposition
Published in Ferroelectrics (01-03-1999)“…Epitaxial thin films of Bi 4 Ti 3 O 12 , SrBi 2 Ta 2 O 9 and BaBi 4 Ti 4 O 15 have been epitaxially deposited onto 3-inch substrates by large area pulsed laser…”
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Structural and electrical properties of metal-ferroelectric-silicon heterostructure fabricated by a direct wafer bonding and layer transfer process
Published in Ferroelectrics (01-03-1999)“…Structural and electrical investigations revealed that a direct wafer bonding and layer transfer process yields good quality ferroelectric/Si interfaces for…”
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Journal Article -
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Direct wafer bonding and layer transfer-a new approach to integration of ferroelectric oxides into silicon technology
Published in Ferroelectrics (01-06-1999)“…Metal-ferroelectric-silicon (MFS) structures were fabricated by a layer transfer process and direct wafer bonding (DWB) and by direct deposition of…”
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Determination of interfacial roughness and its correlation in sputtered CoZr/Cu multilayers
Published in Thin solid films (29-04-1998)“…We relate the information about interfacial roughness in multilayers obtained by X-ray reflectometry in the low angle regime to what can be determined from…”
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Journal Article Conference Proceeding -
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