Search Results - "Senturia, Stephen D."

Dynamics and Response of Polymer-Coated Surface Acoustic Wave Devices: Effect of Viscoelastic Properties and Film Resonance by Martin, Stephen J, Frye, Gregory C, Senturia, Stephen D

“…The response of polymer-coated surface acoustic wave (SAW) devices to temperature changes and polymer vapor absorption is examined. A perturbational approach…”
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Effect of surface roughness on the response of thickness-shear mode resonators in liquids by Martin, Stephen J, Frye, Gregory C, Ricco, Antonio J, Senturia, Stephen D

“…The effect of surface microstructure on the response of thickness-shear mode resonators in contact with liquids was examined. Resonators were fabricated with…”
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The reliability of microelectromechanical systems (MEMS) in shock environments by Srikar, V.T., Senturia, S.D.

“…As a first step toward formulating guidelines for the design of dynamically reliable MEMS, we analyze the mechanical response of, and formulate failure…”
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Extending the travel range of analog-tuned electrostatic actuators by Hung, E.S., Senturia, S.D.

“…The pull-in instability limits the travel distance of elastically suspended parallel-plate electrostatic microactuators to about 1/3 of the undeflected gap…”
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Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs by Hung, E.S., Senturia, S.D.

“…In this paper, we demonstrate how efficient low-order dynamical models for micromechanical devices can be constructed using data from a few runs of fully…”
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Thermoelastic damping in fine-grained polysilicon flexural beam resonators by Srikar, V.T., Senturia, S.D.

“…The design and fabrication of polysilicon flexural beam resonators with very high mechanical quality factors (Q) is essential for many MEMS applications. Based…”
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Computer-aided generation of nonlinear reduced-order dynamic macromodels. I. Non-stress-stiffened case by Gabbay, L. D., Mehner, Jan E., Senturia, S. D.

“…Reduced-order dynamic macromodels are an effective way to capture device behavior for rapid circuit and system simulation. In this paper, we report the…”
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Computer-aided generation of nonlinear reduced-order dynamic macromodels. II. Stress-stiffened case by Mehner, J.E., Gabbay, L.D., Senturia, S.D.

“…For pt. I see ibid., vol. 9, no. 2, p. 262-9 (2000). Reduced-order dynamic macromodels to describe the behavior of microelectromechanical system structures…”
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Simulation and design of microsystems: a 10-year perspective by Senturia, Stephen D.

“…10 years ago, the concept of special CAD systems for microsensors and microactuators was proposed at Transducers '87. We now look back over this 10-year…”
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Speed-energy optimization of electrostatic actuators based on pull-in by Castaner, L.M., Senturia, S.D.

“…The speed and total energy required to accomplish pull-in switching of a generic electrostatic actuator is examined. It is found that the value of the source…”
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Effect of support compliance and residual stress on the shape of doubly supported surface-micromachined beams by Kobrinsky, M.J., Deutsch, E.R., Senturia, S.D.

“…Doubly supported silicon-micromachined beams are increasingly used to study the mechanical properties of materials. Residual stresses in the beams and support…”
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Microfabricated structures for the in situ measurement of residual stress, Young's modulus, and ultimate strain of thin films by ALLEN, M. G, MEHRAN MEHREGANY, HOWE, R. T, SENTURIA, S. D

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CAD challenges for microsensors, microactuators, and microsystems by Senturia, S.D.

“…In parallel with the development of new technologies, new device configurations, and new applications for microsensors, microactuators, and microsystems, also…”
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M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures by Osterberg, P.M., Senturia, S.D.

“…A set of electrostatically actuated microelectromechanical test structures is presented that meets the emerging need for microelectromechanical systems (MEMS)…”
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Simulating the behavior of MEMS devices: computational methods and needs by Senturia, S.D., Azuru, N., White, J.

“…Technologies for fabricating a variety of MEMS devices have developed rapidly, but computational tools that allow engineers to quickly design and optimize…”
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Electrostatic curved electrode actuators by Legtenberg, R., Gilbert, J., Senturia, S.D., Elwenspoek, M.

“…This paper presents the design and performance of an electrostatic actuator consisting of a laterally compliant cantilever beam and a fixed curved electrode,…”
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How to Avoid the Reviewer's Axe: One Editor's View by Senturia, S.D.

“…Based on his many years of experience, a JMEMS editor provides guidelines for authors that will, if followed, greatly reduce the risk of a devastatingly…”
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A wafer-bonded silicon load cell operating in the tensioned-wire regime by Nikolich, A.D., Senturia, S.D.

“…The authors have used wafer-bonding techniques to fabricate a dielectrically isolated single-crystal silicon version of a dual-port, H-shaped resonant load…”
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A solution of the mask overlay problem in microelectromechanical CAD (MEMCAD) by Harris, R.M., Senturia, S.D.

“…The authors present a computationally efficient algorithm for the processing of data from multiple multi-featured masks to produce a planar map of the device…”
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A computer-aided design system for microelectromechanical systems (MEMCAD) by Senturia, S.D., Harris, R.M., Johnson, B.P., Kim, S., Nabors, K., Shulman, M.A., White, J.K.

“…The authors describe the MIT microelectromechanical computer-aided design system (MEMCAD), in which selected commercial software packages are linked with…”
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