Search Results - "Sealy, B."
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1
Optically active erbium centers in silicon
Published in Physical review. B, Condensed matter (15-07-1996)Get full text
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2
On artefacts in the secondary ion mass spectrometry profiling of high fluence H + implants in GaAs
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-06-2010)“…High fluence (>10 17 H/cm 2) ion implantation of H in GaAs is suitable for the ion cut process, and produces H bubbles under the surface which may cause…”
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3
Modeling of high-current source-gated transistors in amorphous silicon
Published in Applied physics letters (14-02-2005)“…Compared with the field-effect transistor, the source-gated transistor has a much lower saturation voltage and higher output impedance. These features are…”
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4
Electron field emission properties of Co quantum dots in SiO2 matrix synthesised by ion implantation
Published in Ultramicroscopy (01-09-2007)“…In this work, Co ions were implanted into thermally oxidised SiO2 layers on silicon substrates. The implantation energy was 50 keV and the doses were 1, 3, 5…”
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5
Enhanced n-type dopant solubility in tensile-strained Si
Published in Thin solid films (03-11-2008)“…The creation of highly conductive ultrashallow-doped regions in strained Si is a key requirement for future Si based devices. It is shown that in the presence…”
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Journal Article Conference Proceeding -
6
Differential Hall profiling of ultra-shallow junctions in Si and SOI
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05-12-2005)“…Determining the electrical characteristics of doped layers is a key challenge in understanding the success of the ion implantation and an anneal process. Hall…”
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7
Implantation induced electrical isolation of sulphur doped GaNxAs1−x layers
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-08-2005)“…The study of III-N-V semiconductor alloys, especially GaNxAs1−x has been increasing in the last few years. The strong dependence of the band gap on the…”
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8
Implant isolation of plasma-assisted MBE grown GaInAsN for opto-telecommunication applications
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-10-2005)“…The material system GaInAsN is considered to be one of the key materials for next generation telecommunication applications providing high data transmission…”
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9
Suppression of boron interstitial clusters in SOI using vacancy engineering
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05-12-2005)“…As CMOS devices scale into the 45 nm process window, the requirements for the individual devices become even more stringent, with levels of activation well…”
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10
Structural and electrical characterisation of ion-implanted strained silicon
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05-12-2008)“…The production of low resistance ultra-shallow junctions for e.g. source/drain extensions using low energy ion-implantation will be required for future CMOS…”
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11
Differential Hall characterisation of ultrashallow doping in advanced Si-based materials
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05-12-2008)“…Strained Si channels are commonly used by manufacturers to enhance CMOS performance and research into novel channel materials (SiGe and Ge) is well underway…”
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12
Low-temperature processing of antimony-implanted silicon
Published in Journal of electronic materials (01-07-2004)“…It is shown for the first time that antimony-implanted silicon produces the highest electrical activation (90%) with low resistivity (<200 ohms/square)…”
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13
Raman scattering studies of ultrashallow Sb implants in strained Si
Published in Journal of materials science. Materials in electronics (01-04-2008)“…Sheet resistance ( R s ) reductions are presented for antimony doped layers in strained Si. We use micro-Raman spectroscopy to characterise the impact of a low…”
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Journal Article Conference Proceeding -
14
Constraints on micro-Raman strain metrology for highly doped strained Si materials
Published in Applied physics letters (09-06-2008)“…Ultraviolet (UV), low penetration depth, micro-Raman spectroscopy, and high-resolution x-ray diffraction (HRXRD) are utilized as complementary, independent…”
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15
The electron field emission properties of ion beam synthesised metal-dielectric nanocomposite layers on silicon substrates
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05-12-2005)“…The search for cold electron field emission materials, with low threshold fields, compatible with existing integrated circuit fabrication has continued to…”
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16
Effect of proton implantation at variable temperatures and doses on the semi-insulating GaAs
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-05-2003)“…The effects of proton irradiation on the electrical properties of semi-insulating gallium arsenide (GaAs) have been investigated to establish if deleterious…”
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17
Annealing characteristics of the implant-isolated n-type GaAs layers: Effects of ion species and implant temperature
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-05-2003)“…The evolution of sheet resistivity with the annealing temperature for implant-isolated n-type GaAs layers has been studied for a variety of ion species…”
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18
Electrical characterization of Fe-doped semi-insulating InP after helium bombardment at different implant temperatures
Published in Applied physics letters (20-05-2002)“…The effect of helium ion bombardment into semi-insulating (SI) InP at room temperature (RT) and 200 °C has been investigated with various ion doses in the…”
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19
The influence of the ion implantation temperature and the dose rate on smart-cut© in GaAs
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01-10-2005)“…The temperature and dose rate dependence of the smart-cut© process in GaAs have been investigated in this paper. The distribution of hydrogen and the…”
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20
Evaluation of BBr2+ and B++Br+ implants in silicon
Published in Materials science & engineering. B, Solid-state materials for advanced technology (05-12-2005)“…The work carried out here examines the suitability of BBr2+ and B+ + Br+ implants into crystalline (100) silicon for ultra-shallow junctions (USJ applications…”
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