Search Results - "Schweitz, Michael A."
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Morphological and Electrical Properties of β-Ga2O3/4H-SiC Heterojunction Diodes
Published in Electronic materials letters (01-11-2021)“…ß-Ga 2 O 3 /4H-SiC heterojunction diodes were fabricated by depositing β-Ga 2 O 3 thin films on 4H-SiC substrates using radio frequency sputtering. X-ray…”
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Journal Article -
2
Effect of Gas Annealing on the Electrical Properties of Ni/AlN/SiC
Published in Micromachines (Basel) (08-03-2021)“…It is shown in this work that annealing of Schottky barrier diodes (SBDs) in the form of Ni/AlN/SiC heterojunction devices in an atmosphere of nitrogen and…”
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3
Analysis of deep level defects in nitrogen post-deposition annealed Ga2O3/SiC hetero-structured Schottky diodes grown by mist-CVD
Published in Applied physics. A, Materials science & processing (01-10-2024)“…We investigated the electrical characterization and defect properties of Ga 2 O 3 /SiC hetero-structured Schottky diodes manufactured by mist chemical vapor…”
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4
Influence of Annealing Atmosphere on the Characteristics of Ga2O3/4H-SiC n-n Heterojunction Diodes
Published in Materials (16-01-2020)“…Ga2O3/4H-SiC n-n isotype heterojunction diodes were fabricated by depositing Ga2O3 thin films by RF magnetron sputtering. The influence of annealing atmosphere…”
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5
Effects of post-deposition annealing on BaTiO3/4H-SiC MOS capacitors using aerosol deposition method
Published in Applied physics. A, Materials science & processing (01-03-2024)“…High-k oxide materials for metal–oxide–semiconductor field-effect transistors and metal–oxide–semiconductor (MOS) structure on SiC have been explored to…”
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6
Influence of Gas Annealing on Sensitivity of AlN/4H-Sic-Based Temperature Sensors
Published in Materials (02-02-2021)“…In this study, the physical and electrical characteristics of an AlN/4H-SiC Schottky barrier diode-based temperature sensor annealed in various gas atmospheres…”
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7
Improved Electrical Characteristics of Gallium Oxide/P-Epi Silicon Carbide Static Induction Transistors with UV/Ozone Treatment Fabricated by RF Sputter
Published in Materials (08-03-2021)“…In this study, static induction transistors (SITs) with beta gallium oxide (β-Ga O ) channels are grown on a p-epi silicon carbide (SiC) layer via radio…”
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8
Effect of Post Annealing on the Electrical Characteristics and Deep Level Defects of Ga2O3/SiC Heterojunction Diodes
Published in ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC) (19-09-2022)“…Ga 2 O 3 /SiC heterojunction were fabricated by RF magnetron sputtering. The influence of nitrogen atmosphere annealing on the electrical and deep level traps…”
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Conference Proceeding -
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Improved Properties of Post-Deposition Annealed Ga2O3/SiC and Ga2O3/Al2O3/SiC Back-Gate Transistors Fabricated by Radio Frequency Sputtering
Published in Micro (01-12-2023)“…The high breakdown electric field, n-type doping capability, availability of high-quality substrates, and high Baliga’s figure of merit of Ga2O3 demonstrate…”
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Journal Article -
10
Impact of annealing on material and electrical characteristics of lithium phosphate thin films on silicon carbide
Published in Journal of materials research and technology (01-05-2023)“…In this study, we investigated the influence of post-deposition annealing (PDA) process on lithium phosphate (Li3PO4) solid-state thin films on silicon carbide…”
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11
Modeling and investigation of the effect of annealing on the electrothermal properties of Ga2O3/SiC heterojunction diodes
Published in Thin solid films (01-06-2022)“…•Ga2O3 films were deposited on two SiC substrates by radio frequency sputtering.•Effect of annealing on electrothermal properties of Ga2O3 thin films…”
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12
Effect of nitrogen and oxygen annealing on (Al0.1Ga0.9)2O3/4H-SiC heterojunction diodes
Published in Thin solid films (01-06-2022)“…•Comparison of as-grown (Al0.1Ga0.9) 3 sputtered films with ones annealed in N2 or O2.•The annealed films showed higher degree of crystallinity than the…”
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13
Bandgap modulation and electrical characteristics of (AlxGa1−x)2O3/4H-SiC thin film heterostructures
Published in Thin solid films (31-07-2022)“…•(AlxGa1−x)2O3 films were deposited on 4H-SiC substrates through RF sputtering.•The annealing temperature of 800 °C formed the crystalline structure…”
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Journal Article -
14
Influence of Annealing Atmosphere on the Characteristics of Ga 2 O 3 /4H-SiC n-n Heterojunction Diodes
Published in Materials (16-01-2020)“…Ga O /4H-SiC n-n isotype heterojunction diodes were fabricated by depositing Ga O thin films by RF magnetron sputtering. The influence of annealing atmosphere…”
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Journal Article -
15
Influence of Metal on Schottky Barrier Inhomogeneity in Ga2O3 Schottky Barrier Diodes
Published in ESSDERC 2022 - IEEE 52nd European Solid-State Device Research Conference (ESSDERC) (19-09-2022)“…A systematic study of Schottky barriers fabricated on Ga 2 O 3 film is reported. The Schottky barrier heights (SBHs) and current transport mechanisms were…”
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Conference Proceeding