Search Results - "Schmitt, J.P.M."
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1
Development of a numerical simulation tool to study uniformity of large area PECVD film processing
Published in Thin solid films (03-03-2003)“…A numerical two dimensional model to calculate the deposition uniformity over the whole electrode surface in large area rectangular plasma enhanced chemical…”
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Journal Article Conference Proceeding -
2
Mode Conversion and Plasma Column Resonances in the Ion-Cyclotron Harmonics Range
Published in Physical review letters (20-09-1976)“…Results are reported for an experiment in which an extraordinary wave was excited in a plasma column with a long RF coil, and linear conversion from the…”
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Journal Article -
3
Large area deposition of a-Si PV modules
Published in IEEE Conference on Photovoltaic Specialists (1990)“…Large-area deposition scaling-up (from 30*30 to 50*60 and 60*100 m/sup 2/) is reported within the context of PV (photovoltaic) industrial development…”
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Conference Proceeding