Search Results - "Schmitt, J. P. M."

A fully automated hot‐wall multiplasma‐monochamber reactor for thin film deposition by Roca i Cabarrocas, P., Chévrier, J. B., Huc, J., Lloret, A., Parey, J. Y., Schmitt, J. P. M.

“…We present a study on the development and the evaluation of a fully automated radio‐frequency glow discharge system devoted to the deposition of amorphous thin…”
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Silane dissociation mechanisms and thin film formation in a low pressure multipole dc discharge by Drevillon, B., Huc, J., Lloret, A., Perrin, J., de Rosny, G., Schmitt, J. P. M.

“…A silane plasma is generated by a hot cathode dc discharge in a partially confining multipolar magnetic structure yielding hydrogenated amorphous silicon thin…”
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Growth of hydrogenated amorphous silicon due to controlled ion bombardment from a pure silane plasma by Drevillon, B., Perrin, J., Siefert, J. M., Huc, J., Lloret, A., de Rosny, G., Schmitt, J. P. M.

“…The growth process, optical and structural properties of a-Si:H films deposited from a silane multipole dc discharge are analyzed by real time and…”
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Dispersion and Cyclotron Damping of Pure Ion Bernstein Waves by Schmitt, J. P. M.

“…Ion Bernstein waves are excited by a long wire in the center of a potassium Q-machine plasma column. Because the wave vector is very nearly perpendicular to…”
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Development of a numerical simulation tool to study uniformity of large area PECVD film processing by Sansonnens, L, Bondkowski, J, Mousel, S, Schmitt, J.P.M, Cassagne, V

“…A numerical two dimensional model to calculate the deposition uniformity over the whole electrode surface in large area rectangular plasma enhanced chemical…”
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Mode Conversion and Plasma Column Resonances in the Ion-Cyclotron Harmonics Range by Schmitt, J. P. M., Krumm, P.

“…Results are reported for an experiment in which an extraordinary wave was excited in a plasma column with a long RF coil, and linear conversion from the…”
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Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive reactors by Sansonnens, L., Strahm, B., Derendinger, L., Howling, A. A., Hollenstein, Ch, Ellert, Ch, Schmitt, J. P. M.

“…In large area reactors, a local asymmetry of the electrode area, due to lateral grounded walls, causes a perturbation in rf plasma potential, due to the…”
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A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition by Roca i Cabarrocas, P. (Pere), Chevrier, J. B, Huc, J, Lloret, A, Parey, J. Y, Schmitt, J. P. M

“…We present a study on the development and the evaluation of a fully automated radio-frequency glow discharge system devoted to the deposition of amorphous thin…”
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Fluctuation in the ion-cyclotron-frequency range - Possible measurement of Te/Ti in tokamaks by Schmitt, J P M, Lehner, T

“…The thermal density fluctuations in a typical tokamak plasma, for a wave vector perpendicular to the magnetic field and for a wavelength of the order of the…”
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Fluctuations in the Ion-Cyclotron-Frequency Range: Possible Measurement of T e T i in Tokamaks by Schmitt, J. P. M., Lehner, T.

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