Search Results - "Satoshi TAKECHI"
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Investigation of Factors Affecting the Ability for Gait Using a Cane and Walking Speed in Patients with Hip Fractures: Factors Determining the Ability for Gait Using a Cane are Different from those Determining Walking Speed
Published in Journal of the Japanese Physical Therapy Association (2015)“…Purpose: The purpose of this study was to clarify factors affecting the ability for gait using a cane and walking speed in patients with hip fractures…”
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Journal Article -
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Investigation of Factors Affecting the Ability for Gait Using a Cane and Walking Speed in Patients with Hip Fractures : Factors Determining the Ability for Gait Using a Cane are Different from those Determining Walking Speed
Published in Journal of the Japanese Physical Therapy Association (2015)Get full text
Journal Article -
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Molecular Design and Synthesis of 3-Oxocyclohexyl Methacrylate for ArF and KrF Excimer Laser Resist
Published in Chemistry of materials (01-09-1994)Get full text
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Theoretical Calculations of Sensitivity of Deprotection Reactions for Acrylic Polymers for 193 nm Lithography II: Protection Groups Containing an Adamantyl Unit
Published in Japanese Journal of Applied Physics (1998)“…The reaction energy of deprotection reactions, glass transition temperature, and the dielectric constant were calculated for photoresists having a…”
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Journal Article -
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193 nm phase-shifting lithography with single layer resist for VLSIs beyond 1 G-bit DRAM
Published in Digest of technical papers - Symposium on VLSI Technology (01-01-1996)“…The usefulness of ArF lithography with single layer resist based on adamantyl copolymer is demonstrated. Using the alternating phase shifting mask, 0.12 mu m…”
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Journal Article -
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Progress in ArF single-layer resists
Published in Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference (1999)“…We have developed chemically amplified resists with adamantylmethacrylate, which have good dry-etch resistance for 193 nm lithography. Our resist system based…”
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Conference Proceeding -
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Multi-generation device fabrication by ArF lithography
Published in International Electron Devices Meeting. IEDM Technical Digest (1997)“…Summary form only given. Although ArF excimer laser lithography is expected to attain the highest resolution possible in optical lithography, its application…”
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Conference Proceeding