Search Results - "Satoshi TAKECHI"

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    193 nm phase-shifting lithography with single layer resist for VLSIs beyond 1 G-bit DRAM by Asai, Satoru, Takechi, Satoshi, Kitamura, Yoshitaka, Tabata, Yasuko, Nozaki, Koji, Yano, Ei, Hanyu, Isamu

    “…The usefulness of ArF lithography with single layer resist based on adamantyl copolymer is demonstrated. Using the alternating phase shifting mask, 0.12 mu m…”
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    Journal Article
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    Progress in ArF single-layer resists by Takechi, S., Otoguro, A., Arita, T.

    “…We have developed chemically amplified resists with adamantylmethacrylate, which have good dry-etch resistance for 193 nm lithography. Our resist system based…”
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    Conference Proceeding
  7. 7

    Multi-generation device fabrication by ArF lithography by Mori, S., Morisawa, T., Matsuzawa, N., Kaimoto, Y., Endo, M., Matsuo, T., Takahashi, M., Naito, T., Naruse, Y., Kishimura, S., Takechi, S., Yamaguchi, A., Uematsu, M., Onodera, T., Nakazawa, K., Kamon, K., Tatsumi, T., Morishita, S., Kuhara, K., Ohfuji, T., Ogawa, T., Ohtsuka, H., Inoue, M., Sasago, M.

    “…Summary form only given. Although ArF excimer laser lithography is expected to attain the highest resolution possible in optical lithography, its application…”
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    Conference Proceeding